Buch, Englisch, 965 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 1630 g
ISBN: 978-3-540-21117-4
Verlag: Springer Berlin Heidelberg
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Verbundwerkstoffe
- Technische Wissenschaften Technik Allgemein Nanotechnologie
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Elektronik, Optik
- Technische Wissenschaften Sonstige Technologien | Angewandte Technik Angewandte Optik
- Naturwissenschaften Physik Quantenphysik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikrowellentechnik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
Weitere Infos & Material
Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.
