Korvink / Paul MEMS: A Practical Guide of Design, Analysis, and Applications
2006
ISBN: 978-3-540-33655-6
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
E-Book, Englisch, 900 Seiten, eBook
ISBN: 978-3-540-33655-6
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Zielgruppe
Research
Autoren/Hrsg.
Weitere Infos & Material
Microtransducer Operation.- Material Properties: Measurement and Data.- MEMS and NEMS Simulation.- System-Level Simulation of Microsystems.- Thermal-Based Microsensors.- Photon Detectors.- Free-Space Optical MEMS.- Integrated Micro-Optics.- Microsensors for Magnetic Fields.- Mechanical Microsensors.- Semiconductor-Based Chemical Microsensors.- Microfluidics.- Biomedical Systems.- Microactuators.- Micromachining Technology.- LIGA Technology for R&D and Industrial Applications.- 17 Interface Circuitry and Microsystems.
