Zimmermann Silicon Optoelectronic Integrated Circuits

2. Auflage 2018
ISBN: 978-3-030-05822-7
Verlag: Springer International Publishing
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band 13, 441 Seiten

Reihe: Springer Series in Advanced Microelectronics

This book reviews various topics in optoelectronics and the design of microelectronic circuits. It introduces readers to the essential features of optical absorption and device physics of photodetectors, as well as their integration in modern CMOS and BiCMOS technologies. This information provides the basis for understanding the underlying mechanisms of Optoelectronic Integrated Circuits (OEICs), which are described in the main part of the book.

In the second edition of this book, new and outstanding integrated high-bandwidth pin photodiodes as well as avalanche photodiodes in the linear mode and in the Geiger mode are introduced. To cover the topic comprehensively, the book presents detailed descriptions of OEICs for a wide range of applications: from various optical sensors, smart sensors, image sensors, 3D-sensors and optical storage systems, to fiber receivers and receivers for optical wireless communication, as well as single-photon detection. This new edition also reflects the latest trends in OEIC research on integrated optical receivers at the quantum limit and electronic-photonic integration, and highlights outstanding 3D-integrated application examples like a multi-node optical switch, an optical transceiver, and a high-resolution 3D sensor.

Autoren/Hrsg.

Zimmermann, Horst

Inhaltsverzeichnis

1;Preface to the Second Edition;6
2;Preface to the First Edition;8
3;Contents;11
4;About the Author;14
5;Symbols;15
6;1 Basics and Theory;20
6.1;1.1 Basics of Optical Absorption;20
6.1.1;1.1.1 Photons and Their Properties;20
6.1.2;1.1.2 Optical Absorption of Important Semiconductor Materials;22
6.1.3;1.1.3 Photogeneration;24
6.2;1.2 Semiconductor Equations;25
6.3;1.3 Important Models for Photodetectors;27
6.3.1;1.3.1 Carrier Drift;28
6.3.2;1.3.2 Carrier Diffusion;32
6.3.3;1.3.3 Quantum Efficiency and Responsivity;35
6.3.4;1.3.4 Equivalent Circuit of a Photodiode;40
6.4;References;43
7;2 Integrated Silicon Photodetectors;44
7.1;2.1 Integrated Detectors in Bipolar Technology;44
7.1.1;2.1.1 Bipolar Processes;44
7.1.2;2.1.2 Integrated Detectors in Standard Bipolar Technology;47
7.1.3;2.1.3 Integrated Detectors in Modified Bipolar Technology;50
7.2;2.2 CMOS-Integrated Photodetectors;53
7.2.1;2.2.1 One-Well CMOS Processes;53
7.2.2;2.2.2 Twin-Well CMOS Processes;54
7.2.3;2.2.3 Triple-Well CMOS Processes;55
7.2.4;2.2.4 Integrated Detectors in Standard CMOS Processes;56
7.2.5;2.2.5 Spatially-Modulated-Light Detector;61
7.2.6;2.2.6 PIN Photodiode;62
7.2.7;2.2.7 Charge-Coupled-Device Image Sensors;77
7.2.8;2.2.8 Active-Pixel Sensors;81
7.2.9;2.2.9 Amorphous-Silicon Detectors;86
7.2.10;2.2.10 CMOS-Integrated Bipolar Phototransistors;88
7.2.11;2.2.11 Photonic Mixer Device;91
7.2.12;2.2.12 Avalanche Photodiodes;92
7.2.13;2.2.13 Single-Photon Avalanche Diodes;95
7.3;2.3 BiCMOS-Integrated Detectors;97
7.3.1;2.3.1 BiCMOS Processes;97
7.3.2;2.3.2 BiCMOS-Integrated Photodiodes;104
7.4;References;113
8;3 Detectors in Thin Crystalline Silicon Films;124
8.1;3.1 Photodiodes in Silicon-on-Insulator;124
8.2;3.2 Silicon on Sapphire;129
8.3;3.3 Polyimide Bonding;130
8.4;References;131
9;4 SiGe Photodetectors;133
9.1;4.1 Heteroepitaxial Growth;133
9.2;4.2 Absorption Coefficient of SiGe Alloys;134
9.3;4.3 SiGe/Si PIN Hetero-Bipolar-Transistor Integration;135
9.4;References;137
10;5 Design of Integrated Optical Receiver Circuits;139
10.1;5.1 Circuit Simulators and Transistor Models;139
10.2;5.2 Layout and Verification Tools;144
10.3;5.3 Design of OEICs;145
10.4;5.4 Transimpedance Amplifier;148
10.4.1;5.4.1 Frequency Response;149
10.4.2;5.4.2 Phase and Group Delay;152
10.4.3;5.4.3 Stability and Compensation;155
10.4.4;5.4.4 Bandwidth of Transistor Transimpedance Amplifier Circuit;155
10.4.5;5.4.5 Bandwidth Limit of Integrated Transimpedance Amplifiers;159
10.4.6;5.4.6 New ?-Model for Integrated Transimpedance Amplifier;160
10.4.7;5.4.7 Shunt-Shunt Feedback;169
10.4.8;5.4.8 Input and Output Resistance;173
10.4.9;5.4.9 Noise and Sensitivity;175
10.4.10;5.4.10 Poisson Statistics and Quantum Limit;183
10.5;References;184
11;6 Examples of Optoelectronic Integrated Circuits;186
11.1;6.1 Digital CMOS Circuits;187
11.1.1;6.1.1 Synchronous Circuits;187
11.1.2;6.1.2 Asynchronous Circuits;192
11.2;6.2 Digital BiCMOS Circuits;194
11.3;6.3 Laser Driver Circuits;195
11.4;6.4 Analog Circuits;198
11.4.1;6.4.1 Bipolar Circuits;198
11.4.2;6.4.2 Two-Dimensional CMOS Imagers;201
11.4.3;6.4.3 Optical Distance Measurement Circuits;211
11.4.4;6.4.4 3D Sensors with Photodiodes in Standard CMOS;215
11.4.5;6.4.5 3D Sensors with PIN Photodiodes;217
11.4.6;6.4.6 3D Sensors with SPADs;221
11.4.7;6.4.7 Smart Pixel Sensors;223
11.4.8;6.4.8 CMOS Optical Sensors;236
11.4.9;6.4.9 BiCMOS Optical Sensors;251
11.4.10;6.4.10 Sensors Using Single-Photon Detection;254
11.4.11;6.4.11 CMOS Circuits for Optical Storage Systems;255
11.4.12;6.4.12 BiCMOS Circuits for Optical Storage Systems;265
11.4.13;6.4.13 Continuous-Mode Fiber Receivers;285
11.4.14;6.4.14 Receiver for Wireless Infrared Communication;329
11.4.15;6.4.15 OWC Receivers and Experiments with Visible Light;337
11.4.16;6.4.16 Hybrid Receivers;350
11.4.17;6.4.17 Speed Enhancement Techniques;352
11.4.18;6.4.18 Plastic-Optical-Fiber Receivers;365
11.4.19;6.4.19 Burst-Mode Optical Receivers;379
11.4.20;6.4.20 Deep-Sub-m Receivers;383
11.4.21;6.4.21 Receivers Aiming Towards the Quantum Limit;386
11.4.22;6.4.22 Comparison of Fiber Receivers;401
11.4.23;6.4.23 Special Circuits;406
11.5;6.5 Summary;410
11.6;References;411
12;7 Circuits for Electronic-Photonic Integration;423
12.1;7.1 3D-Integration Technologies;423
12.1.1;7.1.1 Copper Pillar Connection;423
12.1.2;7.1.2 Through Oxide Vias;424
12.1.3;7.1.3 Through Silicon Vias;425
12.2;7.2 Optical Switch;425
12.3;7.3 Optical Transceiver;436
12.4;7.4 Sensor for Optical Tomography;442
12.5;7.5 Sensor for 3D Microimaging;445
12.6;References;446
13;Index;450