Soueid / Teague / Murday Buildings for Advanced Technology

1. Auflage 2015
ISBN: 978-3-319-24892-9
Verlag: Springer Nature Switzerland
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 188 Seiten

Reihe: Science Policy Reports

This book deals with the design and construction of buildings for nanoscale science and engineering research. The information provided in this book is useful for designing and constructing buildings for such advanced technologies as nanotechnology, nanoelectronics and biotechnology. The book outlines the technology challenges unique to each of the building environmental challenges outlined below and provides best practices and examples of engineering approaches to address them:
• Establishing and maintaining critical environments: temperature, humidity, and pressure
• Structural vibration isolation
• Airborne vibration isolation (acoustic noise)
• Isolation of mechanical equipment-generated vibration/acoustic noise
• Cost-effective power conditioning
• Grounding facilities for low electrical interference
• Electromagnetic interference (EMI)/Radio frequency interference (RFI) isolation
• Airborne particulate contamination
• Airborne organic and chemical contamination
• Environment, safety and health (ESH) considerations
• Flexibility strategies for nanotechnology facilities
The authors are specialists and experts with knowledge and experience in the
control of environmental disturbances to buildings and experimental apparatus.


Ahmad Soueid is Principal/Senior Vice President for HDR Architecture, Inc. and chair of the Institute of Environmental Sciences and Technology (IEST) Nanotechnology Working Group which developed an overview document IEST-RP-NANO200, Planning of Nanoscale Science and Technology Facilities: Guidelines for Design, Construction, and Start-up.  He holds a BS and MS in Architecture from the University of Texas at Arlington. Clayton Teague, now Guest Researcher at the U.S. National Institute of Standards and Technology (NIST), was Director of the U.S. National Nanotechnology Coordination Office (NNCO) from 2003 to 2011.  He also served as the Chair of the American National Standards Institute Technical Advisory Group to the ISO Technical Committee on Nanotechnologies (ISO TC 229) from 2005 - 2011.  He participated in the design/construction of the NIST Advanced Measurement.  He holds a BS and MS in physics from the Georgia Institute of Technology and a PhD in physics from the University of North Texas.   James Murday, now Director of Physical Sciences for the University of Southern California's Office of Research Advancement, was a founding member of the U.S. National Nanotechnology Initiative, and executive secretary to the U.S. Nanoscale Science Engineering and Technology (NSET) Committee from 2001 to 2006.  He participated in the design/construction of the U.S. Naval Research Laboratory's Nanoscience Building.  He holds a BS in physics from the Case Institute of Technology and a PhD in physics from Cornell University.

Autoren/Hrsg.

Soueid, Ahmad

Teague, E. Clayton

Murday, James

Inhaltsverzeichnis

1;Preface;6
2;Acknowledgments;10
3;Contents;12
4;Chapter 1: Introduction;13
4.1;Background;13
5;Chapter 2: Design Criteria;16
5.1;Introduction;16
5.2;Look for the New IEST Guidelines;17
5.3;Establishing Technical Requirements for a Building Project;17
5.4;Temperature and Humidity Control;19
5.5;Vibration Isolation;20
5.6;Airborne Contamination;22
5.7;EMI, RFI, and Electrical Power Conditioning;23
5.8;Planning for Facility Maintenance;24
5.9;Safety;24
5.10;Sustainability;25
5.11;Researchers Are People, Too!;26
5.12;Public Interface;27
5.13;Designing for the Unknown (the Future);28
5.14;Conclusion;29
5.15;Bibliography;29
6;Chapter 3: Temperature and Humidity Control;31
6.1;Introduction;31
6.2;Environment Control for Instrumentation;32
6.3;Design Challenges;32
6.3.1;Temperature;32
6.3.2;Air Filtration;33
6.3.3;Humidity;33
6.3.4;Air Management;34
6.3.5;Control System;34
6.3.6;Vibration Controls;35
6.3.7;Energy Efficiency;36
6.3.8;Integration of the Manifold Requirements;37
6.4;General Laboratories;37
6.5;High Accuracy Laboratories;39
6.5.1;System Components;41
6.6;Bibliography;44
7;Chapter 4: Vibration Isolation;45
7.1;Introduction;45
7.2;Considerations for Vibration and Acoustic Noise;46
7.2.1;Vibration;46
7.2.2;Acoustics;48
7.3;Site Evaluation and Selection;48
7.3.1;Vibration;48
7.3.2;Acoustics;49
7.4;Design Considerations;50
7.4.1;Facility Concept and Layout;50
7.4.2;Foundation;50
7.4.2.1;Slab on Grade (NIST Type-A);51
7.4.2.2;Slab Supported by Air Springs (NIST Type-A1);56
7.4.3;Architectural and Structural Issues;57
7.4.3.1;Interior Walls;57
7.5;Interior Sources of Vibration and Noise;58
7.5.1;Mechanical Systems;58
7.5.2;Control of Vibration from Mechanical Systems;60
7.5.3;Control of Vibration from Electrical Systems;62
7.6;Bibliography;62
8;Chapter 5: Acoustic Noise;64
8.1;Introduction;64
8.2;Acoustics Terminology Review;65
8.2.1;Pressure Versus Power, Decibels;65
8.2.2;Types of Noise;65
8.2.3;Noise Criteria;71
8.3;Impact of Noise on Research and Process Equipment;72
8.3.1;Mechanisms by Which Acoustic Noise Interferes with Equipment;73
8.4;Laboratory Noise Sources and Control;76
8.4.1;Noise Control;77
8.5;Bibliography;78
9;Chapter 6: Disturbances due to Building Mechanical Systems;79
9.1;Introduction;79
9.2;Examples;80
9.2.1;Electron Microscope Operation and Noise Levels;80
9.2.2;Flow at Fan Inlets;80
9.2.3;Swirling Air at Inlet to Vane Axial Fan;81
9.2.4;Sudden Change in Duct Size;82
9.2.5;Large Induced Draft Fan Noise Impacts on the Neighboring Residential Community;84
10;Chapter 7: Electric Power Grounding and Conditioning;86
10.1;Grounding;86
10.1.1;Basic Grounding Requirements for Every Facility;88
10.1.1.1;Stray Power Currents in Building Conductors;88
10.1.1.2;Power Line Filters;89
10.1.2;A Few Common Misconceptions;89
10.1.2.1;Grounding Provides a Path for Return Current Flow So That It Does Not Flow in Sensitive Circuits;89
10.1.2.2;Unwanted Current That Flows Through Building Steel or Through a Conduit Is Not a Problem;89
10.1.2.3;A Circuit of Ground Conductors Can Limit Interference in a Facility;89
10.1.3;The Equipment Designer and the Facility;90
10.1.4;Power Feeds: The Isolation Transformer;90
10.1.5;Magnetic Field Control;90
10.1.6;Methodology in Reducing Electrical Interference in Facility Design;91
10.1.7;Note on Ground Planes;92
10.2;Voltage Stability;92
10.2.1;The SEMI F47 Voltage Sag Standard;92
10.2.2;Control-Level Approach;93
10.2.3;The Voltage Dip Proofing Inverter;94
10.2.4;Constant Voltage Transformer;94
10.2.5;Uninterruptible Power Supply;96
10.2.6;The Dynamic Sag Corrector;97
10.2.7;Coil Hold-In Devices;97
10.3;Bibliography;98
11;Chapter 8: EMI/RFI: Electromagnetic and Radio-Frequency Interference;99
11.1;Introduction;99
11.2;Electromagnetic Spectrum;100
11.3;Recommended AC ELF and DC EMI and RFI Performance Requirements;101
11.3.1;DC Electromagnetic Interference;103
11.3.2;Recommended RFI Thresholds;104
11.4;Defining Ambient EMI/RFI Emission Levels: The Site Survey;104
11.4.1;Ground and Net Current Issues;105
11.5;Schematic Design EMI/RFI Assessment Methods;108
11.5.1;PVC, EMT, and RGS Conduit EMI Simulations and Comparisons;108
11.5.2;Switchgear Simulation and Shielding;110
11.5.3;Elevator DC EMI Issues and Shielding;110
11.5.4;Predicted NMR DC EMI Emission Profiles, Magnetic Shielding and Active-Field Cancellation;112
11.5.5;Near Zero-Milligauss AC ELF Magnetic Shielding Systems for EMI Sensitive Tools;116
11.5.6;Near Zero-Milligauss AC ELF Magnetic Shielding System Options;118
11.6;Final Full-Spectrum EMI/RFI Commissioning;118
11.7;Bibliography;119
12;Chapter 9: Airborne Contamination;121
12.1;Introduction;121
12.2;Cleanroom Design;123
12.3;Bibliography;126
13;Chapter 10: Bio-containment;127
13.1;Introduction;127
13.2;Design Challenges;128
13.2.1;Similar Space Organization;128
13.2.2;Similar Construction;128
13.2.3;Ventilation Requirements;129
13.2.3.1;Nanotechnology Cleanroom;129
13.2.3.2;Biocontainment Facility;129
13.2.4;Space Outfitting;130
13.2.5;Furnishings, Finishes, Fine Details;130
13.3;Colocated Cleanroom/Bio-containment;131
13.4;Bibliography;133
14;Chapter 11: Case Studies and Building Statistics;134
14.1;Part A: Case Studies;134
14.1.1;Introduction;134
14.1.2;Case Study 1: NIST Advanced Measurement Laboratory;135
14.1.2.1;Introduction;135
14.1.2.2;AML Design;136
14.1.2.2.1;Project Site;136
14.1.2.2.2;Building Layout;136
14.1.2.2.3;Organization and Design;137
14.1.2.2.4;Image;138
14.1.2.3;Critical Design Criteria;138
14.1.2.4;Vibration Isolation;139
14.1.2.5;Temperature and Humidity Control;140
14.1.2.6;Clean Electrical Power;140
14.1.2.7;Particulate Control;141
14.1.2.8;State-of-the-Art Laboratories;141
14.1.2.9;The Nanofabrication Facility;142
14.1.2.10;Instrument Labs East and West;142
14.1.2.11;Metrology Labs East and West;142
14.1.2.12;NIST: A Vibration Criteria;143
14.1.3;Case Study 2: The National Institute for Nanotechnology, The University of Alberta;145
14.1.3.1;Introduction;145
14.1.3.2;NINT Project Summary;145
14.1.3.2.1;Personnel and Facilities;145
14.1.3.3;Program Summary (Table11.2);146
14.1.3.4;Research Program;146
14.1.3.5;NINT Phase 1 Project Summary;147
14.1.4;Case Study 3: Oak Ridge National Laboratory Advanced Microscopy Laboratory;147
14.1.5;Case Study 4: Generic Analytical Instrumentation Facility;150
14.1.5.1;Introduction;150
14.1.5.2;General;150
14.1.5.3;Special;151
14.1.5.4;Acoustic Noise;151
14.1.5.5;Mechanical Vibrations;151
14.1.5.6;Electromagnetic Interference;152
14.1.5.7;Environmental Changes;153
14.1.5.8;Remote Instrument Operation;154
14.1.6;Case Study 5: Generic 300mm Wafer Fabrication Facility;154
14.1.6.1;Introduction;154
14.1.6.2;Wafer Fabrication Facilities;154
14.1.6.3;What Types of Contamination Are of Concern?;155
14.2;Part B: Building Statistics;159
14.2.1;Introduction;159
14.2.2;Birck Nanotechnology Center;160
14.2.2.1;Purdue University, West Lafayette, IN;160
14.2.3;National Institute for Nanotechnology;161
14.2.3.1;University of Alberta, Edmonton, Canada;161
14.2.4;Naval Research Laboratory Nanoscience Building;162
14.2.4.1;NRL, Washington, DC;162
14.2.5;Center for Integrated Nanotechnologies;164
14.2.5.1;Sandia National Laboratories, Albuquerque, NM; Los Alamos National Laboratory, Los Alamos, NM;164
14.2.6;Molecular Foundry;166
14.2.6.1;Lawrence Berkeley National Laboratory, Berkeley, CA;166
14.2.7;Advanced Measurement Laboratory;167
14.2.7.1;National Institute of Standards and Technology, Gaithersburg, MD;167
14.2.8;National Institute of Standards and Technology, Advanced Measurement Laboratory;169
14.2.8.1;Facts and Figures;169
14.2.8.1.1;Architectural;169
14.2.8.1.2;Class 100 Cleanroom Facility;169
14.2.8.1.3;Structural;169
14.2.8.1.4;Electrical;169
14.2.8.1.5;Mechanical;170
14.2.8.1.6;Plumbing;170
14.2.8.1.7;Fire Protection;170
15;Appendix A. Workshop Agendas;171
16;Appendix B. Participants and Contributors;178
17;Index;184