Buch, Englisch, 260 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 576 g
Reihe: MEMS Reference Shelf
Structural Approaches to Improve Robustness
Buch, Englisch, 260 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 576 g
Reihe: MEMS Reference Shelf
ISBN: 978-0-387-09535-6
Verlag: Springer US
MEMS Vibratory Gyroscopes provides a solid foundation in the theory and fundamental operational principles of micromachined vibratory rate gyroscopes, and introduces structural designs that provide inherent robustness against structural and environmental variations. In the first part, the dynamics of the vibratory gyroscope sensing element is developed, common micro-fabrication processes and methods commonly used in inertial sensor production are summarized, design of mechanical structures for both linear and torsional gyroscopes are presented, and electrical actuation and detection methods are discussed along with details on experimental characterization of MEMS gyroscopes. In the second part, design concepts that improve robustness of the micromachined sensing element are introduced, supported by constructive computational examples and experimental results illustrating the material.
Zielgruppe
Professional/practitioner
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
- Technische Wissenschaften Verkehrstechnik | Transportgewerbe Fahrzeugtechnik
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
- Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau
- Wirtschaftswissenschaften Wirtschaftssektoren & Branchen Fertigungsindustrie Luftfahrtindustrie
- Technische Wissenschaften Verkehrstechnik | Transportgewerbe Luft- und Raumfahrttechnik, Luftverkehr
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
Weitere Infos & Material
Fundamentals of Micromachined Vibratory Gyroscopes.- Fundamentals of Micromachined Gyroscopes.- Fabrication Technologies.- Mechanical Design of MEMS Gyroscopes.- Electrical Design of MEMS Gyroscopes.- Structural Approaches to Improve Robustness.- Linear Multi DOF Architecture.- Torsional Multi DOF Architecture.- Distributed Mass Architecture.- Conclusions and Future Trends.
