Setter Electroceramic-Based MEMS

Fabrication-Technology and Applications
1. Auflage 2006
ISBN: 978-0-387-23319-2
Verlag: Springer US
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, Band 9, 414 Seiten, eBook

Reihe: Electronic Materials: Science & Technology

The book is focused on the use of functional oxide and nitride thin films to increase functionality and application range of MEMS (microelectromechanical systems) in the large sense, including micro-sensors, micro-actuators, and electronic components for high frequency communications. The book covers major topics and is divided into two parts (a) applications and emerging applications, and (b) materials, fabrication technologies, and functioning issues.

Zielgruppe

Research

Autoren/Hrsg.

Setter, Nava

Inhaltsverzeichnis

Applications and Devices.- MEMS-Based Thin Film and Resonant Chemical Sensors.- Microactuators Based on Thin Films.- Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films.- Thick-Film Piezoelectric and Magnetostrictive Devices.- Micromachined Infrared Detectors Based on Pyroelectric Thin Films.- RF Bulk Acoustic Wave Resonators and Filters.- High Frequency Tuneable Devices Based on Thin Ferroelectric Films.- MEMS for Optical Functionality.- Materials, Fabrication-Technology, and Functionality.- Ceramic Thick Films for MEMS.- Thin Film Piezoelectrics for MEMS.- Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices.- Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics.- Microfabrication of Piezoelectric MEMS.- Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics.- Low-Cost Patterning of Ceramic Thin Films.