Saka Metallic Micro and Nano Materials

Fabrication with Atomic Diffusion
1. Auflage 2011
ISBN: 978-3-642-15411-9
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 238 Seiten

Reihe: Engineering Materials

This book focuses on the metallic Nano- and Micro-materials (NMMs) fabricated by physical techniques such as atomic diffusion. A new technology for fabricating NMMs by atomic diffusion is presented. Two kinds of atomic diffusion are treated; one is a phenomenon caused by electron flow in high density and called electromigration and the other is stress migration which depends on a gradient of hydrostatic stress in a material. In three parts, the book describes the theory of atomic diffusion, the evaluation of physical properties and the treatment and applications of metallic NNMS. The new methods such as atomic diffusion are expected are expected to be crucial for the fabrication of NNMs in the future and to partially replace methods based on chemical reactions.

Autoren/Hrsg.

Saka, Masumi

Inhaltsverzeichnis

1;Metallic Micro and Nano Materials;2
1.1;Preface;4
1.2;Contents;6
1.3;1 Introduction;9
1.3.1;1…Background;9
1.3.2;2…Typical Micro and Nano Materials;10
1.3.3;3…Importance of Fabricating Micro and Nano Metallic Materials;11
1.3.4;4…Fabrication of Micro and Nano Metallic Materials;12
1.3.4.1;4.1 Vapor--Liquid--Solid Growth;12
1.3.4.2;4.2 Template-Based Synthesis;13
1.3.4.3;4.3 Stress Migration;14
1.3.4.4;4.4 Electromigration;16
1.3.5;5…Importance of Evaluation and Modification;17
1.3.6;6…Summary;19
1.3.7;Acknowledgments;20
1.3.8;References;21
1.4;2 Basis of Atomic Diffusion;23
1.4.1;Abstract;23
1.4.2;1…Electromigration;24
1.4.2.1;1.1 Historical Review of EM;24
1.4.2.2;1.2 Theory of EM (Huntington--Grone Equation);24
1.4.2.3;1.3 Polycrystalline Structure of Metallic Thin Films;26
1.4.2.4;1.4 Bamboo Structure in Metallic Thin Films;26
1.4.2.5;1.5 Effect of Passivation on EM;27
1.4.2.6;1.6 Governing Parameter for EM Damage, AFD;27
1.4.2.6.1;1.6.1 Formulation of AFD;27
1.4.2.6.2;1.6.2 Comparison of Terms in AFD Formula;31
1.4.2.6.3;1.6.3 Comparison in Straight Part of Angled Metal Line;33
1.4.2.6.4;1.6.4 Comparison Near Corner of Angled Metal Line;35
1.4.2.6.5;1.6.5 General Expression of AFD;39
1.4.2.6.6;1.6.6 Constant Electrical Resistivity within Rectangular Unit;39
1.4.2.6.7;1.6.7 Application of AFD;41
1.4.2.7;1.7 Derivation Method of Characteristic Constants of EM;43
1.4.2.7.1;1.7.1 Failure Mode in Via-Connected Line;43
1.4.2.7.2;1.7.2 Governing Parameter for EM Damage at Polycrystalline Line Ends;44
1.4.2.7.3;1.7.3 AFD-Based Method for Derivation Utilizing Drift Velocity of Line End;45
1.4.2.7.4;1.7.4 Experimental Procedure for Derivation;47
1.4.2.7.5;1.7.5 Results and Discussions of Derivation;49
1.4.3;2…Stress Migration;50
1.4.3.1;2.1 Introduction;50
1.4.3.2;2.2 Historical Review of Typical SM-Induced Phenomena;51
1.4.3.2.1;2.2.1 Spontaneous Sn Whisker Growth;51
1.4.3.2.2;2.2.2 Fabrication of Nanowires by Utilizing Controllable SM;53
1.4.3.3;2.3 Summary;54
1.4.4;Acknowledgments;56
1.4.5;References;56
1.5;3 Fabrication of Micro and Nano Metallic Materials;60
1.5.1;Abstract;60
1.5.2;1…Introduction;61
1.5.3;2…Fabrication of Micro and Nano Metallic Materials by Utilizing EM;61
1.5.3.1;2.1 Effect of Temperature Gradient on Atomic Diffusion;61
1.5.3.2;2.2 Effective Atomic Accumulation Due to an Introduced Artificial Slit;65
1.5.3.3;2.3 Fabrication of Al Micro Spheres by Utilizing EM;66
1.5.3.4;2.4 Fabrication of Al Micro Belts by Utilizing EM;70
1.5.3.5;2.5 Effect of Purity of Source Material on Fabrication of Al Micro/Thin Materials;72
1.5.3.6;2.6 Effect of Temperature on Controlling EM to Selectively Form Micro and Nano Materials;74
1.5.3.7;2.7 Numerical Simulation of Fabrication of Micro/Nano Materials;79
1.5.3.7.1;2.7.1 Simulation Method;79
1.5.3.7.2;2.7.2 Effect of Product Condition on Fabrication;81
1.5.3.7.3;2.7.3 Effect of Specimen’s Shape on Fabrication;85
1.5.4;3…Fabrication of Micro and Nano Metallic Materials by Utilizing SM;88
1.5.4.1;3.1 Rapid and Mass Formation of Cu Nanowires by Utilizing SM;88
1.5.4.1.1;3.1.1 Stress Concentration in Polycrystalline Cu Films;88
1.5.4.1.2;3.1.2 Process of SM-Induced Cu Nanowire Growth;89
1.5.4.1.3;3.1.3 Governing Parameters for SM-Induced Cu Nanowire Growth;92
1.5.4.2;3.2 Fabrication of Ag Micro Materials by Utilizing SM;93
1.5.4.2.1;3.2.1 Effect of Temperature on the Formation of SM-Induced Ag Micro Materials;94
1.5.4.2.2;3.2.2 Effect of Thickness of Passivation Layer on the Formation of SM-Induced Ag Micro Materials;95
1.5.5;Acknowledgments;96
1.5.6;References;97
1.6;4 Evaluation of Mechanical Properties;100
1.6.1;Abstract;100
1.6.2;1…Overview of Mechanical Tests;100
1.6.3;2…Contact Resonance of Concentrated-Mass Cantilevers;105
1.6.3.1;2.1 Short History of Atomic Force Microscopy and Dynamic Modes;105
1.6.3.2;2.2 Dynamics of Bending;109
1.6.3.2.1;2.2.1 Equations of Bending Motion of Inextensional Thin Rods;109
1.6.3.2.2;2.2.2 Linear Theory of Beam Vibration;111
1.6.3.3;2.3 Dynamics of Concentrated-Mass Cantilevers;114
1.6.3.4;2.4 Evaluation of Elastic Modulus;117
1.6.4;3…Large Bending Test of Nanowires;120
1.6.4.1;3.1 Introduction;120
1.6.4.2;3.2 Theory on Equilibrium Bent-Shape of Nanowires;121
1.6.4.2.1;3.2.1 Preliminary;121
1.6.4.2.2;3.2.2 Elliptic Functions;124
1.6.4.2.3;3.2.3 Formula of the Elastica;125
1.6.4.3;3.3 Evaluation of Elastic Modulus and Strength;127
1.6.4.3.1;3.3.1 Procedure;127
1.6.4.3.2;3.3.2 Experimental Results and Evaluation;129
1.6.4.4;3.4 Diameter Dependency of Elastic Modulus;134
1.6.5;4…Small-Span Bending Test;137
1.6.5.1;4.1 Importance of Bending Test;137
1.6.5.2;4.2 Testing Scheme;137
1.6.5.3;4.3 Example of Small-Span Bending Test;139
1.6.5.3.1;4.3.1 Sample;139
1.6.5.3.2;4.3.2 Experimental Setup;140
1.6.5.3.3;4.3.3 Results;140
1.6.6;Acknowledgments;144
1.6.7;References;145
1.7;5 Evaluation of Electrical Properties;149
1.7.1;Abstract;149
1.7.2;1…Introduction;149
1.7.2.1;1.1 Conductivity Measurement of Metallic Nanowires;151
1.7.2.2;1.2 Geometry (Cross-section Shape) of Nanowires;151
1.7.2.3;1.3 Measuring the Dimensions (Length and Cross-Section Area) of Nanowires;152
1.7.2.4;1.4 Measuring the Resistance of Nanowires;153
1.7.2.5;1.5 Determining the Grain Size of Nanowires;155
1.7.3;2…The FPP Method;155
1.7.3.1;2.1 The Advantage of the FPP Method;155
1.7.3.2;2.2 The Modified FPP Method;156
1.7.4;3…The Four-Point AFM Probe Method;157
1.7.4.1;3.1 Fabrication of the Four-Point AFM Probe;158
1.7.4.2;3.2 A Nanowire Sample and Its AFM Image;160
1.7.4.3;3.3 Measuring the Conductivity of the Nanowire;160
1.7.5;4…The microwave AFM Method;163
1.7.5.1;4.1 Fabricating the Tip of the M-AFM Probe;165
1.7.5.2;4.2 Fabrication of the M-AFM Probe;165
1.7.5.3;4.3 Measuring Topography by M-AFM Probe;168
1.7.5.4;4.4 Microwave Image Obtained by the M-AFM;170
1.7.5.5;4.5 Measurement of Electrical Properties by M-AFM;172
1.7.6;Acknowledgments;175
1.7.7;References;175
1.8;6 Modification of Nano/Micromaterials;179
1.8.1;Abstract;179
1.8.2;1…Welding and Cutting of Materials;180
1.8.2.1;1.1 Introduction;180
1.8.2.2;1.2 Heat Conduction in Thin Wires;183
1.8.2.3;1.3 Melting Phenomenon at Nanocontacts;186
1.8.2.3.1;1.3.1 Analysis of Temperature at Nanocontacts;186
1.8.2.3.2;1.3.2 Governing Parameter;188
1.8.2.3.3;1.3.3 Thermal Function;189
1.8.2.4;1.4 Cutting of Ultrathin Pt Wires;190
1.8.2.4.1;1.4.1 Experimental;190
1.8.2.4.2;1.4.2 Results and Thermal Function;191
1.8.2.5;1.5 Welding of Ultrathin Pt Wires;193
1.8.2.5.1;1.5.1 Experimental;193
1.8.2.5.2;1.5.2 Monitoring of Welding Process;194
1.8.2.5.3;1.5.3 Welding Condition;196
1.8.3;2…Application of Welding and Cutting;200
1.8.3.1;2.1 Manipulation of a Small-Scaled Object;200
1.8.3.1.1;2.1.1 Background;200
1.8.3.1.2;2.1.2 Concept of Manipulation;200
1.8.3.1.3;2.1.3 Electrical Test;201
1.8.3.2;2.2 Fabrication of a Small-Scaled Electromagnetic Ring;203
1.8.3.2.1;2.2.1 Background;203
1.8.3.2.2;2.2.2 Fabrication;204
1.8.3.2.3;2.2.3 Potential of Micro-Rings as Magnetic Sources;206
1.8.3.3;2.3 Fabrication of a Small-Scaled Thermoelectric Element;207
1.8.3.3.1;2.3.1 Background;207
1.8.3.3.2;2.3.2 Fabrication of Thermocouple;208
1.8.3.3.3;2.3.3 Seebeck Effect;209
1.8.3.3.4;2.3.4 Temperature Profile on Thin Pt Wire;210
1.8.4;3…Permanent Bending of Brittle Nanowires for Formation of Nanocoils;211
1.8.4.1;3.1 Introduction;211
1.8.4.2;3.2 Residual Stress in Deposited Thin Films;212
1.8.4.3;3.3 Misfit-Strain-Induced Bending of Nanowires;216
1.8.4.3.1;3.3.1 Nanocoil Formation of Chromium-Deposited Copper Nanowires;216
1.8.4.3.2;3.3.2 Enhanced Bending by Viscous Flow of Core Material;219
1.8.5;Acknowledgments;223
1.8.6;References;223
1.9;Index;227