Microsystem Technology and Microrobotics

1997
ISBN: 978-3-540-60658-1
Verlag: Springer Berlin Heidelberg

Buch, Englisch, 408 Seiten, HC runder Rücken kaschiert, Format (B × H): 160 mm x 241 mm, Gewicht: 1710 g

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.

Zielgruppe

Research

Autoren/Hrsg.

Rembold, Ulrich

Fatikow, Sergej

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
• Mathematik | Informatik EDV | Informatik Daten / Datenbanken Informationstheorie, Kodierungstheorie
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Robotik
• Interdisziplinäres Wissenschaften Wissenschaften: Forschung und Information Informationstheorie, Kodierungstheorie
• Mathematik | Informatik EDV | Informatik Informatik Rechnerarchitektur
• Technische Wissenschaften Technik Allgemein Mathematik für Ingenieure
• Mathematik | Informatik EDV | Informatik Informatik Künstliche Intelligenz Wissensbasierte Systeme, Expertensysteme

Inhaltsverzeichnis

1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.