Buch, Englisch, 408 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 1710 g
ISBN: 978-3-540-60658-1
Verlag: Springer Berlin Heidelberg
Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many other purposes. This book is a basic introduction to MST for students, engineers, and scientists. It is the first of its kind to cover MST in its entirety. It gives a comprehensive treatment of all important parts of MST such as microfabrication technologies, microactuators, microsensors, development and testing of microsystems, and information processing in microsystems. It surveys products built to date and experimental products and gives a comprehensive view of all developments leading to MST devices and robots.
Zielgruppe
Research
Autoren/Hrsg.
Fachgebiete
- Technische Wissenschaften Technik Allgemein Mathematik für Ingenieure
- Mathematik | Informatik EDV | Informatik Informatik Rechnerarchitektur
- Mathematik | Informatik EDV | Informatik Informatik Künstliche Intelligenz Wissensbasierte Systeme, Expertensysteme
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikroprozessoren
- Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Robotik
- Mathematik | Informatik EDV | Informatik Daten / Datenbanken Informationstheorie, Kodierungstheorie
- Interdisziplinäres Wissenschaften Wissenschaften: Forschung und Information Informationstheorie, Kodierungstheorie
Weitere Infos & Material
1 Ideas and Problems of Microsystem Technology and Microrobotics.- 2 Microsystem Technology Applications.- 3 Techniques of Microsystem Technology.- 4 Key Processes to Produce Micromechanical Components.- 5 Microactuators: Principles and Examples.- 6 Microsensors: Principles and Examples.- 7 MST and Information Processing.- 8 Microrobotics.
