E-Book, Englisch, Band 45, 463 Seiten, eBook
Reimer Scanning Electron Microscopy
Erscheinungsjahr 2013
ISBN: 978-3-662-13562-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
Physics of Image Formation and Microanalysis
E-Book, Englisch, Band 45, 463 Seiten, eBook
Reihe: Springer Series in Optical Sciences
ISBN: 978-3-662-13562-4
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark
The aim of this book is to outline the physics of image formation, electron specimen interactions, imaging modes, the interpretation of micrographs and the use of quantitative modes "in scanning electron microscopy (SEM). lt forms a counterpart to Transmission Electron Microscopy (Vol. 36 of this Springer Series in Optical Sciences) . The book evolved from lectures delivered at the University of Münster and from a German text entitled Raster-Elektronenmikroskopie (Springer-Verlag), published in collaboration with my colleague Gerhard Pfefferkorn. In the introductory chapter, the principles of the SEM and of electron specimen interactions are described, the most important imaging modes and their associated contrast are summarized, and general aspects of eiemental analysis by x-ray and Auger electron emission are discussed. The electron gun and electron optics are discussed in Chap. 2 in order to show how an electron probe of small diameter can be formed, how the elec tron beam can be blanked at high frequencies for time-resolving exper iments and what problems have tobe taken into account when focusing.
Zielgruppe
Research
Autoren/Hrsg.
Weitere Infos & Material
1. Introduction.- 2. Electron Optics of a Scanning Electron Microscope.- 3. Electron Scattering and Diffusion.- 4. Emission of Electrons and X-Ray Quanta.- 5. Detectors and Signal Processing.- 6. Imaging with Secondary and Backscattered Electrons.- 7. Electron-Beam-Induced Current, Cathodoluminescence and Special Techniques.- 8. Crystal Structure Analysis by Diffraction.- 9. Elemental Analysis and Imaging with X-Rays.- References.
