Nanofabrication

Principles and Applications
1. Auflage 2016
ISBN: 978-3-319-31740-3
Verlag: Springer

Buch, Englisch, 81 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 1474 g

Reihe: SpringerBriefs in Materials

This book provides an overview of the techniques and tools of nanostructure fabrication from state-of-the-art lithography to emerging self-assembly approaches. Top-down and bottom-up methodologies along with hybrid approaches are used to illustrate the fabrication of structures including integrated circuits, semiconductor quantum dots, metallic nanoparticles, carbon nanotubes, molecular structures, nanocomposites, arrays and superstructures. Nanofabrication applications in nanoelectronics, biotechnology, nanomechanical devices and nanophotonics will be examined. This brief will present the core concepts of nanofabrication relevant to researchers and industry in this important and rapidly evolving area.

Zielgruppe

Research

Autoren/Hrsg.

Papadopoulos, Christo

Fachgebiete

• Naturwissenschaften Physik Elektromagnetismus Halbleiter- und Supraleiterphysik
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Materialwissenschaft: Biomaterialien, Nanomaterialien, Kohlenstoff

Inhaltsverzeichnis

Introduction.- Silicon Planar Processing and Photolithography.- Direct-write Lithography Approaches.- Stamping Methods.- Scanning-probe Methods.- Natural Lithography.- Direct-Growth and Self-assembly.- Practical Examples and Case Studies of Nanofabrication.