Morita Roadmap of Scanning Probe Microscopy

1. Auflage 2006
ISBN: 978-3-540-34315-8
Verlag: Springer Berlin Heidelberg
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 201 Seiten

Reihe: NanoScience and Technology

Scanning tunneling microscopy has achieved remarkable progress and become the key technology for surface science. This book predicts the future development for all of scanning probe microscopy (SPM). Such forecasts may help to determine the course ultimately taken and may accelerate research and development on nanotechnology and nanoscience, as well as all in SPM-related fields in the future.

Autoren/Hrsg.

Morita, Seizo

Inhaltsverzeichnis

1;Preface;6
2;Contents;8
3;List of Contributors;15
4;1 Science and Technology in the Twenty-First Century;18
4.1;1.1 Trend of Science and Technology in the Twenty-First Century;18
4.2;1.2 Previous Prospect in SPM Roadmap 2000 and the State- of- the- Art;20
4.3;1.3 SPM Roadmap;21
4.4;References;23
5;2 Scanning Tunneling Microscopy;24
5.1;2.1 Basic Principle of Scanning Tunneling Microscopy;24
5.2;2.2 History of STM;27
5.3;2.3 Present States and Unsettled Issues;29
5.4;2.4 Roadmap;30
5.5;References;31
6;3 Atomic Force Microscopy;32
6.1;3.1 Principle;32
6.2;3.2 History;35
6.3;3.3 Present Situation and Issues;36
6.4;3.4 Roadmap;37
6.5;References;38
7;4 Near-Field Scanning Optical Microscope;39
7.1;4.1 Principle of NSOM;39
7.2;4.2 Progress in Fundamental Performance of NSOM;40
7.3;4.3 Current State of NSOM;42
7.4;4.4 Roadmap;44
7.5;References;48
8;5 Scanning Capacitance Microscope;50
8.1;5.1 Principle of SCM;50
8.2;5.2 Practical Dopant Profiling by SCM;52
8.3;5.3 Other SPMs for Dopant Profiling;54
8.4;5.4 Roadmap;55
8.5;References;57
9;6 Electrostatic Force Microscopy;58
9.1;6.1 Fundamentals;58
9.2;6.2 Present State and Problems;61
9.3;6.3 Roadmap;64
9.4;References;66
10;7 Magnetic Force Microscope;67
10.1;7.1 Principle of MFM [1, 2];67
10.2;7.2 History of MFM;71
10.3;7.3 MFM Applications to Magnetic Recording Media;71
10.4;7.4 Roadmap of MFM;73
10.5;References;75
11;8 STM-Induced Photon Emission Spectroscopy;76
11.1;8.1 Characteristics;76
11.2;8.2 Emission Mechanism;77
11.3;8.3 History of Research and Development;79
11.4;8.4 Present Situation and Issues;79
11.5;8.5 Roadmap;80
11.6;References;83
12;9 Scanning Atom Probe;84
12.1;9.1 What is the Scanning Atom Probe?;84
12.2;9.2 Mass Analysis of Nonmetallic Specimens by the SAP;85
12.3;9.3 Present State and Problems;87
12.4;9.4 Roadmap;88
12.5;References;89
13;10 Chemical Discrimination of Atoms and Molecules;90
13.1;10.1 Recognition of Atom and Molecules; Inelastic Tunneling Spectroscopy;90
13.2;10.2 Chemical Identification of Atoms by AFM;92
13.3;10.3 Roadmap;95
13.4;References;96
14;11 Manipulation of Atoms and Molecules;97
14.1;11.1 Manipulation of Atoms and Molecules: With the Use of STM Through Vibrational Excitation of Molecules;97
14.2;11.2 Manipulation of Atoms and Molecules by AFM;99
14.3;11.3 Roadmap;104
14.4;References;106
15;12 Multiprobe SPM;107
15.1;12.1 Present Status;107
15.2;References;111
16;13 AFM Measurement in Liquid;113
16.1;13.1 Demand for AFM Imaging in Liquid;113
16.2;13.2 Dynamic Mode AFM Imaging in Liquid;114
16.3;13.3 Technical Issues;117
16.4;13.4 Roadmap;118
16.5;References;120
17;14 High-Speed SPM;121
17.1;14.1 Optimization of AFM Devices for High-Speed Scanning;121
17.2;14.2 World Trends in the High-Speed SPM;124
17.3;14.3 Roadmap;126
17.4;References;127
18;15 Scanning Nonlinear Dielectric Microscope;129
18.1;15.1 Principle and Theory for SNDM;129
18.2;15.2 Microscopic Observation of Area Distribution of Ferroelectric Domain Using SNDM;130
18.3;15.3 Visualization of Stored Charge in Semiconductors Using SNDM;132
18.4;15.4 SNDM Ferroelectric Probe Memory;133
18.5;15.5 Roadmap;133
18.6;References;134
19;16 SPM Coupled with External Fields;135
19.1;16.1 Light-Illumination STM;135
19.2;16.2 Coupling with Outer Field; Electron Spin Resonance Detection using STM;136
19.3;16.3 Roadmap;139
19.4;References;139
20;17 Probe Technology;140
20.1;17.1 Introduction;140
20.2;17.2 Carbon Nanotube Probe;141
20.3;17.3 Roadmap;143
20.4;References;143
21;18 Characterization of Semiconducting Materials;144
21.1;18.1 Characterization of Semiconductor Surfaces;144
21.2;18.2 Characterization of Semiconductor Interfaces;146
21.3;18.3 Characterization and Manipulation of Semiconductor Nanostructures;146
21.4;18.4 Characterization of Defects in Semiconductors;147
21.5;18.5 Characterization of Semiconductor Processes;148
21.6;References;148
22;19 Evaluation of SPM for LSI Devices;149
22.1;19.1 LSI Devices and Forecast;149
22.2;19.2 Present Evaluation Technologies of LSI Devices and Latest Trend of SPM Characterization;151
22.3;19.3 Roadmap;157
22.4;References;159
23;20 SPM Characterization of Catalysts;161
23.1;20.1 SPM for What?;161
23.2;20.2 Roadmap;162
23.3;References;163
24;21 SPM Characterization of Biomaterials;164
24.1;21.1 Bioscience;164
24.2;21.2 Biotechnology;167
24.3;21.3 Roadmap;169
24.4;References;174
25;22 SPM Characterization of Organic and Polymeric Materials;175
25.1;22.1 Characterization of Organic Materials;175
25.2;22.2 Characterization of Polymeric Materials;179
25.3;22.3 Roadmap;182
25.4;References;182
26;23 Theories of SPM;184
26.1;23.1 Present Status of Theories of STM;184
26.2;23.2 Present Status of the Theory for AFM;185
26.3;23.3 Development of SPM Simulator;186
26.4;23.4 Present Status and Problems with Theories and Simulations of NSOM;190
26.5;23.5 Roadmap;193
26.6;References;195
27;24 When Will SPM Realize Our Dreams? The Roadmap of SPM;196
28;Index;203