Lenk / Ballas / Werthschützky Electromechanical Systems in Microtechnology and Mechatronics

Electrical, Mechanical and Acoustic Networks, their Interactions and Applications
1. Auflage 2010
ISBN: 978-3-642-10806-8
Verlag: Springer
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 472 Seiten

Reihe: Microtechnology and MEMS

Electromechanical systems consisting of electrical, mechanical and acoustic subsystems are of special importance in various technical fields, e.g. precision device engineering, sensor and actuator technology, electroacoustics and medical engineering. Based on a circuit-oriented representation, providing readers with a descriptive engineering design method for these systems is the goal of this textbook. It offers an easy and fast introduction to mechanical, acoustic, fluid, thermal and hydraulic problems through the application of circuit-oriented basic knowledge. The network description methodology, presented in detail, is extended to finite network elements and combined with the finite element method (FEM): the combination of the advantages of both description methods results in novel approaches, especially in the higher frequency range. The book offers numerous current examples of both the design of sensors and actuators and that of direct coupled sensor-actuator systems. The appendix provides more extensive fundamentals for signal description, as well as a compilation of important material characteristics. The textbook is suitable both for graduate students and for engineers working in the fields of electrical engineering, information technology, mechatronics, microtechnology, and mechanical and medical engineering.

Autoren/Hrsg.

Lenk, Arno

Ballas, Rüdiger G.

Werthschützky, Roland

Pfeifer, Günther

Inhaltsverzeichnis

1;Preface;6
2;Contents;9
3;List of Symbols;14
4;Part I Focus of the Book;24
4.1;1 Introduction;25
4.1.1;1.1 Focus of the Book;26
4.1.2;1.2 Fields of Application and Examples for Electromechanical Systems;28
4.1.3;1.3 Design of Electromechanical Systems;31
4.1.4;1.4 Simulation Methods for Electromechanical Systems;32
4.1.4.1;1.4.1 Historical Overview;32
4.1.4.2;1.4.2 Design Methods;35
4.2;2 Electromechanical Networks and Interactions;37
4.2.1;2.1 Signal Description and Signal Transmission in Linear Networks;38
4.2.1.1;2.1.1 The Circular Function as Basic Module for Time Functions of Linear Networks;38
4.2.1.2;2.1.2 Fourier Expansion of Time Functions;42
4.2.1.3;2.1.3 The Fourier Transform;47
4.2.1.4;2.1.4 The Laplace Transform;55
4.2.2;2.2 Electrical Networks;58
4.2.3;2.3 Mechanical Networks;62
4.2.4;2.4 Interactions;66
4.2.4.1;2.4.1 Mechanical Interactions;66
4.2.4.2;2.4.2 Electromechanical Interactions;68
4.2.5;2.5 Structured Network Representation of Linear Dynamic Systems;78
4.2.6;2.6 Basic Equations of Linear Networks;80
5;Part II Network Representation of Systems with Lumped and Distributed Parameters;81
5.1;3 Mechanical and Acoustic Networks with Lumped Parameters;82
5.1.1;3.1 Mechanical Networks for Translational Motions;83
5.1.1.1;3.1.1 Arrangements;83
5.1.1.2;3.1.2 Coordinates;85
5.1.1.3;3.1.3 Components;87
5.1.1.4;3.1.4 Rules of Interconnection;95
5.1.1.5;3.1.5 Isomorphism between Mechanical and Electrical Circuits;98
5.1.1.6;3.1.6 Representation of Transient Characteristics of Mass Point Systems in the Frequency Domain (BODE diagram);100
5.1.1.7;3.1.7 Network Representation of Mass Point Systems;106
5.1.1.8;3.1.8 Sample Applications;109
5.1.2;3.2 Mechanical Networks for Rotational Motions;120
5.1.2.1;3.2.1 Coordinates;121
5.1.2.2;3.2.2 Components and System Equations;122
5.1.2.3;3.2.3 Isomorphism between Mechanical and Electrical Circuits;123
5.1.2.4;3.2.4 Sample Application for a Rotational Network;127
5.1.3;3.3 Acoustic Networks;128
5.1.3.1;3.3.1 Coordinates;129
5.1.3.2;3.3.2 Acoustic Components;130
5.1.3.3;3.3.3 Network Representation of Acoustic Systems;131
5.1.3.4;3.3.4 Real Acoustic Components;135
5.1.3.5;3.3.5 Isomorphism between Acoustic and Electrical Circuits;141
5.1.3.6;3.3.6 Sample Applications;141
5.2;4 Abstract Linear Network;149
5.2.1;4.1 Coordinates;149
5.2.2;4.2 Components;150
5.2.3;4.3 Nodal and Loop Rules;152
5.2.4;4.4 Characteristics of the Abstract Linear Network;152
5.3;5 Mechanical Transducers;157
5.3.1;5.1 Translational-Rotational Transducer;157
5.3.1.1;5.1.1 Rigid Rod;157
5.3.1.2;5.1.2 Bending Rod;161
5.3.2;5.2 Mechanical-Acoustic Transducer;166
5.3.2.1;5.2.1 Ideal and Real Mechanical-Acoustic Piston Transducers;167
5.3.2.2;5.2.2 General Elastomechanical-Acoustic Plate Transducer;169
5.3.3;5.3 Characteristics of Selected Mechanical-AcousticTransducers;171
5.4;6 Mechanical and Acoustic Networks with Distributed Parameters;184
5.4.1;6.1 Representation of Mechanical Systems asone-dimensional Waveguides;184
5.4.1.1;6.1.1 Extensional Waves within a Rod;185
5.4.1.2;6.1.2 Approximate Calculation of the Input Impedance;191
5.4.1.3;6.1.3 Approximate Representation of an Impedance at Resonance;196
5.4.1.4;6.1.4 Approximated two-port Network Representation at Resonance;197
5.4.1.5;6.1.5 Flexural Vibrations within a Rod;202
5.4.2;6.2 Network Representation of Acoustic Systems as Linear Waveguides;211
5.4.3;6.3 Modeling of Transducer Structures with Finite Network Elements;214
5.4.3.1;6.3.1 Ultrasonic Microactuator with Capacitive Diaphragm Transducer;214
5.4.3.2;6.3.2 Fluid-filled Pressure Transmission System of a Differential Pressure Sensor;217
5.4.4;6.4 Combined Simulation with Network and Finite Element Methods;221
5.4.4.1;6.4.1 Applied Combination of Network Methods and Finite Element Methods;223
5.4.4.2;6.4.2 Combined Simulation using the Example of a Dipole Bass Loudspeaker;228
5.4.4.3;6.4.3 Combined Simulation using the Example of a Microphone with Thin Acoustic Damping Fabric;235
6;Part III Electromechanical Transducers;245
6.1;7Electromechanical Interactions;246
6.1.1;7.1 Classification of Electromechanical Interactions;246
6.1.2;7.2 Network Representation of Electromechanical Interactions;250
6.2;8 Magnetic Transducers;264
6.2.1;8.1 Electrodynamic Transducer;264
6.2.1.1;8.1.1 Derivation of the Two-Port Transducer Network;264
6.2.1.2;8.1.2 Sample Applications;268
6.2.2;8.2 Electromagnetic Transducer;284
6.2.2.1;8.2.1 Derivation of the Two-Port Transducer Network;285
6.2.2.2;8.2.2 Sample Applications;292
6.2.3;8.3 Piezomagnetic Transducer;302
6.2.3.1;8.3.1 Derivation of the Two-Port Transducer Network;303
6.2.3.2;8.3.2 Sample Applications;313
6.2.3.3;8.3.3 Piezomagnetic Unimorph Bending Elements;319
6.3;9 Electrical Transducers;329
6.3.1;9.1 Electrostatic Transducer;329
6.3.1.1;9.1.1 Electrostatic Plate Transducer;329
6.3.1.2;9.1.2 Sample Applications;339
6.3.1.3;9.1.3 Electrostatic Diaphragm Transducer;347
6.3.1.4;9.1.4 Sample Applications;350
6.3.1.5;9.1.5 Electrostatic Solid Body Transducers;355
6.3.1.6;9.1.6 Sample Application;357
6.3.2;9.2 Piezoelectric Transducers with Lumped Parameters;361
6.3.2.1;9.2.1 Model Representation of the Piezoelectric Effect;361
6.3.2.2;9.2.2 Piezoelectric Equations of State and Circuit Diagram forLongitudinal Coupling;364
6.3.2.3;9.2.3 General Piezoelectric Equations of State;366
6.3.2.4;9.2.4 Piezoelectric Transducers and Corresponding EquivalentParameters;369
6.3.2.5;9.2.5 Piezoelectric Bending Bimorph Elements;374
6.3.2.6;9.2.6 Piezoelectric Materials;376
6.3.2.7;9.2.7 Sample Applications;381
6.3.3;9.3 Piezoelectric Transducer as one-dimensional Waveguide;386
6.3.3.1;9.3.1 Transition from Lumped Parameters to the Waveguide usingthe Example of an Accelerometer;387
6.3.3.2;9.3.2 Piezoelectric Longitudinal Oscillator as Waveguide;391
6.3.3.3;9.3.3 Piezoelectric Thickness Oscillator as Waveguide;391
6.3.3.4;9.3.4 Sample Applications of Piezoelectric Longitudinal andThickness Oscillators;397
6.3.3.5;9.3.5 Piezoelectric Beam Bending Element as Waveguide;408
6.3.3.6;9.3.6 Sample Applications of Piezoelectric Beam BendingElements;409
6.4;10 Reciprocity in Linear Networks;429
6.4.1;10.1 Reciprocity Relations in Networks with only One Physical Structure;429
6.4.2;10.2 Reciprocity Relations in General Linear Two-Port Networks;431
6.4.3;10.3 Electromechanical Transducers;433
6.4.4;10.4 Mechanical-Acoustic Transducers;436
7;Part IV Appendix;438
7.1;A Characteristics of Selected Materials;439
7.1.1;A.1 Material Characteristics of Crystalline Quartz;439
7.1.2;A.2 Piezoelectric Constants of Sensor Materials;440
7.1.3;A.3 Characteristics of Metallic Structural Materials;441
7.1.4;A.4 Material Characteristics of Silicon and Passivation Layers;442
7.1.4.1;A.4.1 Comparison of Main Characteristics of Silicon, Silicon Dioxide and Silicone Nitride Layers;442
7.1.4.2;A.4.2 Characteristics of Silicon Dioxide Layers;443
7.1.4.3;A.4.3 Characteristics of Silicon Nitride Layers;444
7.1.5;A.5 Characteristics of Ceramic Structural Materials;445
7.1.6;A.6 Material Characteristics of Selected Polymers;446
7.1.7;A.7 Characteristics of Plastics as Structural Materials;447
7.1.8;A.8 Composition and Material Characteristics of Selected Glasses;448
7.1.9;A.9 Material Characteristics of Metallic Solders and Glass Solders;449
7.1.10;A.10 Sound Velocity and Characteristic Impedance;450
7.2;B Signal Description and Transfer within LinearNetworks;451
7.2.1;B.1 Fourier Expansion of Time Functions;451
7.2.1.1;B.1.1 Estimate of Approximation Error with Numerical Analyses of Fourier Series;451
7.2.1.2;B.1.2 Sample Application for the Periodic Iteration of Singular Processes;454
7.2.2;B.2 Ideal Impulse and Step Functions;456
7.2.2.1;B.2.1 Problem Definition;456
7.2.2.2;B.2.2 Ideal Impulses and their System Response;457
7.2.2.3;B.2.3 The Ideal Step Function and its System Response;462
7.2.3;B.3 The Convolution Integral;463
8;References;466
9;Index;471