Multi-Wafer Rotating Mems Machines

Turbines, Generators, and Engines
2. Printing.
ISBN: 978-0-387-77746-7
Verlag: Springer Us

Buch, Englisch, 456 Seiten, Format (B × H): 164 mm x 244 mm, Gewicht: 1850 g

Reihe: MEMS Reference Shelf

The collaboration and research that was developed to produce the MIT Gas Turbine Engine are described in this book. Both the engine and generator are fabricated from silicon using a combination of bulk and surface microfabrication technologies. The book discusses the technical details that have gone into producing the engine and the overall systems-level tradeoffs, in particular its motor compressors and turbine generators, and the decisions that have been made.

Zielgruppe

Research

Autoren/Hrsg.

Lang, Jeffrey

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Triebwerkstechnik, Energieübertragung

Inhaltsverzeichnis

to PowerMEMS.- System Design Considerations and Device Overview.- Materials, Structures and Packaging.- Microengine Fabrication.- Fabrication of Microscale Rotating Magnetic Machines.- High-Speed Gas Bearings for Micro-Turbomachinery.- Thermofluidics and Turbomachinery.- Motors and Generators.- Microcombustors for Rotating Machinery.