Ohring's Materials Science of Thin Films

Deposition and Structure
3rd Auflage
ISBN: 978-0-12-822540-0
Verlag: Elsevier Science

Buch, Englisch, 784 Seiten, Format (B × H): 191 mm x 235 mm

Materials Science of Thin Films: Deposition and Structure, Third Edition is an ideal resource for science and engineering students in advanced undergraduate or first-year graduate level courses on thin films as well as scientists and engineers who are entering the field or require an overview of thin films. The book provides the most comprehensive coverage of materials science and technology related to thin films and coatings of any book, bringing the most important advances made since the publication of the previous edition. All chapters have been fully revised and include new illustrations, examples, and exercises.

Autoren/Hrsg.

Kubart, Tomas

Sarakinos, Kostas

Abadias, Grégory

Patsalas, Panos

Gall, Daniel

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde
• Naturwissenschaften Chemie Physikalische Chemie

Inhaltsverzeichnis

1. Introduction to Thin Films
2. Vacuum Science and Technology
3. Thin-Film Evaporation Processes
4. Discharges, Plasmas, and Ion-Surface Interactions
5. Plasma and Ion Beam Processing of Thin Films
6. Chemical Vapor Deposition
7. Substrate Surfaces and Thin-Film Nucleation
8. Epitaxy
9. Film Structure
10. Characterization of Thin Films and Surfaces
11. Interdiffusion, Reactions, and Transformations in Thin Films
12. Mechanical Properties of Thin Films

Über Autor(innen)

Sarakinos, Kostas
Kostas Sarakinos holds a Ph.D. degree in Physics from RWTH Aachen University, Germany (2008) and a Docent degree in Materials Physics from Linköping University, Sweden (2012). His research interests include dynamics and atomistic mechanisms during initial thin film formation stages, thin film growth simulations, thin film microstructural and texture evolution, synthesis of optical, magnetic and photocatalytic thin films, and highly ionized and pulsed physical vapor deposition processes.

Kubart, Tomas
Dr. Kubart's research is focused on synthesis of materials by magnetron sputtering. He is primarily interested in the physics of reactive sputtering, processes taking place at the surfaces and ion surface interaction especially in HiPIMS. Part of his work also includes synthesis of various thin films, especially oxides for electronics and optics, and sulfides for photovoltaics.

Patsalas, Panos
Professor Panos Patsalasis specializes in thin film deposition of metals, nitrides and oxides by dc, pulsed dc and rf sputtering, Ion beam and evaporation techniques. He is experienced on X-ray Reflectivity and Diffraction techniques, modelling and simulation of deposition processes.

Abadias, Grégory
Professor Grégory Abadias is responsible for the 'Thin Film Growth' activities at the Pprime Institute at the University of Poitiers and has a strong experience with TMN, especially ternary and quaternary coatings. He is the coordinator of the MC2 project,