Kittler / Richter Gettering and Defect Engineering in Semiconductor Technology IV

Erscheinungsjahr 1991
ISBN: 978-3-0357-0301-6
Verlag: Trans Tech Publications
Format: PDF
Kopierschutz: 0 - No protection

E-Book, Englisch, 660 Seiten

The volume contains 78 contributions to the important field of semiconductor defect control and defect engineering.

Autoren/Hrsg.

Kittler, M.

Richter, H.

Inhaltsverzeichnis

Preface
Intrinsic/Internal Gettering in Czochralski Silicon Wafers
Defects and impurities in Multi Layer Structures on Si: The Role of Mechanical Stresses in Gettering of Defects and Impurities by Intrinsic and Extrinsic Grain Boundaries
Precipitation of Iron in Silicon: Gettering to Extended Surface Defects Sites
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Assessment of Thermal Stability
Gettering of Copper and Nickel in Czochralski Silicon by Oxide Particles: Dependence on Oxide Particle Density and Cooling Rate
On the Role of Stacking Faults in Copper Precipitation in Silicon
TEM Studies of the Gettering of Copper, Palladium and Nickel in Czochralski Silicon by Small Oxide Particles
An Influence of Carbon on Intrinsic Gettering Quality and Circuit Performance
Intrinsic Gettering in Nitrogen-Doped Cz-Si
Application of Doped Polysilicon Layers in a BICMOS-Technology
Self-Interstitial Atoms and Structure of Intrinsic Getter in Silicon Crystals
Internal Gettering Effectiveness for Transition Metals /Fe,Ni/ in Cz-SI
Intrinsic Gettering of Radiation Defects in Silicon Caused by High-Temperature Oxygen-Containing Defects
Defect Engineering in Submicron CMOS Technologies
Contamination Control in Si ULSI-Technology at the 1011cm-3 - Level and below
Point Defect Engineering for ULSI Silicide Processing
Defect Control and Gettering in Cz-Silicon
Silicon Device Engineering by Intrinsic Point Defect Control
Defect Engineering in a High-Voltage Substrate Technology
Thermal Wafer Warpage and its Avoidance
Defects in Crystalline Silicon - History and Outlook
Defect Spectroscopy in Compound Semiconductors
Formation and Defect Structure of FeIn Pairs in Silicon
EPR Identification of Mn- or Cr-Acceptor Pairs in Silicon
The Influence of RTA on Deep States in Si-Implanted GaAs MESFET Structures Investigated by DLTS and ODLTS
Study of Electron and Hole Emission from Deep States in Undoped Semi-Insulating GaAs by PICTS and Photo-DLTS
'New Donors' in Heat-Treated Cz-Si - What is Really New There?
The Thermal Acceptor in Nitrogen Doped Cz Silicon
On Carbon-Implantation Induced Donors in Silicon
A Search on the Identity of the Ev+0.34 eV C-Related Defect in p-Si
Simulation of Hydrogen Diffusion in n and p Type Silicon: Determination of Kinetic and Thermodynamic Parameters
Hydrogen Passivation of Grain Boundaries in Polysilicon: Computer Simulation
Modification of the Properties of Si Crystals Exposed to Atomic Hydrogen at High Temperatures
Simulation of Point-Defect Assisted Diffusion of Boron in RTA-Treated Silicon Wafers
Dopant Deactivation and Electrically Active Defects Induced in Silicon by CF4 and CBrF3 Plasma Etching
Formation and Properties of Metastable Silicide Precipitates in Silicon
Mechanical Behaviour of Semiconductors in Terms of Dislocation Dynamics
Dislocation Kink Dynamics and Gettering Processes in Semiconductors
Local Distribution of Structure Defects Induced by Microhardness Indentation in GaAs
Dynamics of a Dislocation in the Potential Relief of Semiconductor Crystals under Varying Applied Forces
Peculiarities of Dislocation Luminescence of Covalent Semiconductors
Defects in Multicrystalline Silicon
Origin of Recombination at Extended Defects: EBIC Contrast Experiments and Theory on Dislocations in GaAs
Electrical Properties of Dislocation Impurity Atmospheres in Si
Electrical Properties of Defects in Multicrystalline Silicon
Process Induced Defects in TiSi2-N+/P-Structures
Evolution of Process - Induced Defects in Silicon under Hydrostatic Pressure
Evolution of Monoclinic SiAs Precipitates in Heavily As+ Implanted and Isothermally Annealed Silicon
Defect Structures in Si Preamorphized Wafers
Behavior of Implanted Nitrogen in Si with the Buried Layer of SiO2 Precipitates
Interaction of Implanted into Silicon Fluorine with Radiation Defects
Electrical Activity of Halogen-Silicon Complexes
Radiation Defect-Induced Optical Absorption of GaP
Synchrotron Radiation X-Ray Topography of Growth Striations in Magnetic-Field-Applied Czochralski Silicon
Applications of In Situ Transmission Electron Microscopy to the Characterization of Process-Induced Defects
TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP
Defect Generation in Cz-Silicon Used for the Design of Synchrotron Monochromator Crystals
X-Ray Diffractometry and Topography of CdHgTe Bulk Crystals and CdHgTe-CdTe Epitaxial Structures
Grazing Incidence Diffraction X-Ray Topography
Indirect Excitations in the X-Ray Standing Wave Method
Double-Channel X-Ray Standing Wave Technique for Impurity Atom Location in Multicomponent Crystals
Spectroscopical and Electrical Evidences about Segregation Effects in Semiconductors
DLTS of High-Resistivity Si
Evaluation of DLTS Measurements in the Case of "Broadened" Spectra or a Barrier Limited Capture Process
B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes
Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements
Nonlinear Recombination and Diffusion Processes in Si and GaAs
Carrier Recombination Processes in PbTe Films by Picosecond IR Excitation
Investigation on Electrical Contacts on N-Type Silicon
Diagnostics of Defects from the Noise Spectra
Statistical Analysis of the Assembly-Induced Degradation of the Silicon Device Parameters
Mechanical Strain Relaxation during Lattice-Mismatched Epitaxial Growth
Interfacial Dislocations in the GaSb/GaAs (001) Heterostructure
Si/Ge - Heterostructures - Stability of Strained Layer Superlattices
Distribution of Defects in InAs1-x-ySbxPy-InAs DHs
Nature of Defects in MOCVD Grown GaAlAs-GaAs QW DHs
XPS Sputter Depth Profiling Applid to the Analysis of Si/SiO2, Si/SiOxNy and Si/Si3N4
Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment
Germanium and Antimony Epitaxy with Large Lattice Misfit
TEM Investigations on the Structure and Stability of Diffusion Barriers for VLSI Contacts
Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates
SOI by Silicon Wafer Direct Bonding - Problems of Wafer Warpage and Surface Chemistry
Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source
Zinc and Zinc-Impurity Pairs in Silicon