Inertial MEMS

Erscheinungsjahr 2019
ISBN: 978-0-521-76658-6
Verlag: Cambridge University Press

Buch, Englisch, 492 Seiten, Format (B × H): 175 mm x 250 mm, Gewicht: 1027 g

A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Autoren/Hrsg.

Kempe, Volker

Fachgebiete

• Technische Wissenschaften Verfahrenstechnik | Chemieingenieurwesen | Biotechnologie Fertigungsverfahren der Präzisionsgeräte
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Bauelemente, Schaltkreise
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien

Inhaltsverzeichnis

Preface; Acknowledgement; Notation; 1. Introduction; 2. Transducers; 3. Non-inertial forces; 4. MEMS - technologies; 5. First level packaging; 6. Electrical interfaces; 7. Accelerometers; 8. Gyroscopes; 9. Test and calibration; 10. Concluding remarks; Index.

Über Autor(innen)

Kempe, Volker
Volker Kempe has more than 40 years of experience in research and development. He led the microelectronics engineering department at Austria Mikro Systems for over ten years. In 2003 he co-founded and became Vice President of SensorDynamics AG, and his current interests focus on the functionality, technology, and application of inertial MEMS.