Sem Microcharacterization of Semiconductors

Erscheinungsjahr 1989
ISBN: 978-0-12-353855-0
Verlag: ACADEMIC PR INC

Buch, Englisch, Band 12, 452 Seiten, Format (B × H): 159 mm x 235 mm, Gewicht: 816 g

Reihe: Techniques of Physics

Applications of SEM techniques of microcharacterization have proliferated to cover every type of material and virtually every branch of science and technology. This book emphasizes the fundamental physical principles. The first section deals with the foundation of microcharacterization in electron beam instruments and the second deals with the interpretation of the information obtained in the main operating modes of a scanning electron microscope.

Zielgruppe

Condensed matter physicists, surface and materials scientists, electronic and optics engineers, and solid state chemists.

Autoren/Hrsg.

Holt, D. B.

Joy, D. C.

Fachgebiete

• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Elektronische Baugruppen, Elektronische Materialien
• Naturwissenschaften Chemie Anorganische Chemie Nichtmetallische Chemie

Inhaltsverzeichnis

Foundations of Microcharacterization in Electron Beam Instruments: D.B. Holt, An Introduction to Multi-Mode Scanning Electron Microscopy. D. Newbury, Modeling Electron Beam Interactions in Semiconductors. D.C. Joy, Channeling Patterns. D.C. Joy, The Emissive Mode and X-ray Microanalysis. Quantitation and the Interpretation of Signals in the Individual Modes: S.M. Davidson, Voltage Contrast and Stroboscopy. D.B. Holt, The Conductive Mode. O. Breitenstein and J. Heydenreich, Scanning Deep Level Transient Spectroscopy. D.B. Holt and B.G. Yacobi, Cathodoluminescence Characterization of Semiconductors. P. Balk, The Electroacoustic Mode.