Low-Energy Ion Irradiation of Solid Surfaces

Softcover Nachdruck of the original 1. Auflage 1999
ISBN: 978-3-662-14739-9
Verlag: Springer

Buch, Englisch, Band 146, 294 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 464 g

Reihe: Springer Tracts in Modern Physics

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

Zielgruppe

Research

Autoren/Hrsg.

Gnaser, Hubert

Fachgebiete

• Naturwissenschaften Physik Quantenphysik Atom- und Molekülphysik
• Naturwissenschaften Chemie Physikalische Chemie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Werkstoffprüfung

Inhaltsverzeichnis

Interaction of low-energy ions with solids.- Composition changes in multicomponent materials.- Ion bombardment of crystalline semiconductors.- Ionization processes of sputtered atoms and molecules.