Franssila Introduction to Microfabrication

2. Auflage 2010
ISBN: 978-1-119-99189-2
Verlag: John Wiley & Sons
Format: EPUB
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 534 Seiten, E-Book

This accessible text is now fully revised and updated, providing anoverview of fabrication technologies and materials needed torealize modern microdevices. It demonstrates how commonmicrofabrication principles can be applied in differentapplications, to create devices ranging from nanometer probe tipsto meter scale solar cells, and a host of microelectronic,mechanical, optical and fluidic devices in between. Latestdevelopments in wafer engineering, patterning, thin films, surfacepreparation and bonding are covered.
This second edition includes:
* expanded sections on MEMS and microfluidics related fabricationissues
* new chapters on polymer and glass microprocessing, as well asserial processing techniques
* 200 completely new and 200 modified figures
* more coverage of imprinting techniques, process integration andeconomics of microfabrication
* 300 homework exercises including conceptual thinkingassignments, order of magnitude estimates, standard calculations,and device design and process analysis problems
* solutions to homework problems on the complementary website, aswell as PDF slides of the figures and tables within the book
With clear sections separating basic principles from moreadvanced material, this is a valuable textbook for seniorundergraduate and beginning graduate students wanting to understandthe fundamentals of microfabrication. The book also serves as ahandy desk reference for practicing electrical engineers, materialsscientists, chemists and physicists alike.
www.wiley.com/go/Franssila_Micro2e

Autoren/Hrsg.

Franssila, Sami

Inhaltsverzeichnis

Preface to the First Edition.
Preface to the Second Edition.
Acknowledgements.
1 Introduction.
Characterization.
3 Simulation of Microfabrication Processes.
4 Silicon.
5 Thin-Film Materials and Processes.
6 Epitaxy.
7 Advanced Thin Films.
8 Pattern Generation.
9 Optical Lithography.
10 Advanced Lithography.
11 Etching.
12 Wafer Cleaning and Surface Preparation.
13 Thermal Oxidation.
14 Diffusion.
15 Ion Implantation.
16 CMP: Chemical-Mechanical Polishing.
17 Bonding.
18 Polymer Microprocessing.
19 Glass Microprocessing.
20 Anisotropic Wet Etching.
21 Deep Reactive Ion Etching.
22 Wafer Engineering.
23 Special Processes and Materials.
24 Serial Microprocessing.
25 Process Integration.
26 MOS Transistor Fabrication.
27 Bipolar Transistors.
28 Multilevel Metallization.
29 Surface Micromachining.
30 MEMS Process Integration.
31 Process Equipment.
32 Equipment for Hot Processes.
33 Vacuum and Plasmas.
34 CVD and Epitaxy Equipment.
35 Cleanrooms.
36 Yield and Reliability.
37 Economics of Microfabrication.
38 Moore's Law and Scaling Trends.
39 Microfabrication at Large.
Appendix A Properties of Silicon.
Appendix B Constants and Conversion Factors.
Appendix C Oxide and Nitride Thickness by Color.
Index.

Über Autor(innen)

Professor Sami Franssila, Helsinki University of Technology,Finland
Sami Franssila has taught courses on microfluidics, bioMEMs,microsystems, nanoscience, silicon microtechnology and thin-filmtechnology at Helsinki University of Technology since 1998. He isgroup leader of the Microfabrication group at Micronova, the Centrefor Micro and Nanotechnology which is run jointly by the VTTTechnical Research Centre of Finland and Helsinki University ofTechnology.
Professor Franssila researches into micro- and nanofabrication forfluidic, chemical and biological devices, chemical microsystems andthin film technology.
He has authored or co-authored over 60 peer reviewed articles, 120international conference papers and written one textbookIntroduction to Microfabrication, published by John Wiley& Sons in 2004.