Cerofolini Nanoscale Devices

Fabrication, Functionalization, and Accessibility from the Macroscopic World
1. Auflage 2009
ISBN: 978-3-540-92732-7
Verlag: Springer Berlin Heidelberg
Format: PDF
Kopierschutz: 1 - PDF Watermark

E-Book, Englisch, 205 Seiten

Reihe: NanoScience and Technology

The second half of the twentieth century and the beginning of the twenty ?rst have been characterized by the most impressive industrial revolution ever seen. In - proximately 40years, the complexity of integrated circuits (ICs) has increased by a 9 factor of 10 , with a corresponding reduction of the cost per bit by eight orders of magnitude. Not only has this evolution allowed dramatic progress in allscienti?c ?elds (large computers, space probes, etc.), but also has fueled the economic development with the raise of new markets (personal computers, cellular phones, etc.) and even social revolutions (world wide web, global village, etc.). In last years, however, the situation has signi?cantly changed: the continuous scaling down of device size has eventually brought the IC major technique, p- tolithography, to its limits. Overcoming its original limits has been proved to be possible, but the price to pay for that has changed the playing rules - while at the beginning of the IC history the evolution was driven by technology, now it is driven by economy, the cost of a medium size production plant being in the range of a few billion dollars.

Gianfranco ('GF') Cerofolini (degree in Physics from the University of Milan, 1970) is visiting researcher at the University of Milano-Bicocca. His major interests are addressed to the physical limits of miniaturization and to the 'emergence' of higher-level phenomena from the underlying lower-level substrate (measurement in quantum mechanics, life in biological systems, etc.). Although his research activity has been carried out in the industry (vacuum: SAES Getters; telecommunication: Telettra; chemistry and energetics: ENI; integrated circuits: STMicroelectronics), he has had frequent collaborations with academic centers (University of Lublin, IMEC, Stanford University, City College of New York, several Italian Universities), has been lecturer in a few Universities (Pisa, Modena, and Polytechnic of Milan), and currently is lecturer at the University of Milano-Bicocca. His research has covered several areas: adsorption, biophysics, CMOS processing (oxidation, diffusion, ion implantation, gettering), electronic and optical materials, theory of acidity, and nanoelectronics. A gettering technique of widespread use in microelectronics, the complete setting of ST's first silicon-gate CMOS process, the development of a process for low-fluence SOI, and the identification of a strategy for molecular electronics via a conservative extension of the existing microelectronic technology, are among his major industrial achievements. His main scientific results range from the preparation and characterization of ideal silicon p-n junctions and the discovery of a mechanism therein of pure generation without recombination, to the theoretical description of layer-by-layer oxidation at room temperature of silicon, and to the development of original mathematical techniques for the description of adsorption on heterogeneous or soft surfaces. The results of his activity have been published in approximately 300 articles, chapters to books, and encyclopaedic items, and in a score of patents.

Autoren/Hrsg.

Cerofolini, Gianfranco

Inhaltsverzeichnis

1;Preface;7
2;Contents;10
3;List of Acronyms;14
4;Part I Basics;16
4.1;1 Matter on the Nanoscale;17
4.1.1;1.1 Nanotechnology and the (N+ 1) Problem;18
4.1.2;1.2 Microelectronics is a Nanotechnology;19
4.1.3;1.3 From Microlectronics to Molecular Electronics ;20
4.2;2 Top-Down Paradigm to Miniaturization;22
4.2.1;2.1 The Path Toward Size Reduction ;23
4.2.2;2.2 Going Down with Device Size is a Hard Uphill Path;27
4.2.2.1;2.2.1 The Physical Limit;27
4.2.2.2;2.2.2 The Technological Limit;28
4.2.2.3;2.2.3 The Economic Limit;29
4.2.3;2.3 Going Beneath the Limiting Size;30
4.3;3 Physical Limits to Miniaturization;32
4.3.1;3.1 A Case Study: The Limits of Computation;32
4.3.2;3.2 The Basic Computational Unit;33
4.3.3;3.3 Programming;37
4.3.3.1;3.3.1 Limits Imposed by the Uncertainty Principle;37
4.3.3.2;3.3.2 Limits Imposed by Ballistic Material Motion;38
4.3.3.3;3.3.3 Limits Imposed by the Thermal Embedding ;39
4.3.4;3.4 Computation and Irreversibility ;42
4.3.4.1;3.4.1 Irreversible Computation;42
4.3.4.2;3.4.2 Reversible Computation;43
4.3.4.3;3.4.3 Minimum Dissipation ;45
4.3.4.4;3.4.4 Computation and Measure;49
4.3.5;3.5 Reading;52
4.3.5.1;3.5.1 Coupling the Carrier with the External World;53
4.3.5.2;3.5.2 Physical Limits in read Operation;53
4.3.5.3;3.5.3 A Little Step Toward Practical Implementation;57
4.4;4 The Crossbar Structure ;58
4.4.1;4.1 The Crossbar Process;59
4.4.2;4.2 Process Integration ;63
4.4.3;4.3 Why Molecules?;64
4.5;5 Crossbar Production ;66
4.5.1;5.1 Imprint Lithography;67
4.5.2;5.2 Spacer Patterning Technology;69
4.5.3;5.3 Multispacer Patterning Technology;69
4.5.3.1;5.3.1 Multiplicative Route: SnPT;70
4.5.3.2;5.3.2 Additive Route: SnPT+;74
4.5.4;5.4 Minimum Exploitable Bar Width;80
4.6;6 The Litho-to-Nano link ;82
4.6.1;6.1 The Horizontal Beveling Technique ;84
4.6.2;6.2 Fusing Adjacent Lines in SnPT+ ;85
4.6.3;6.3 Energetic Filtering ;88
4.6.4;6.4 Technology and Architecture ;90
4.6.5;6.5 Not Only Crossbars;92
4.6.5.1;6.5.1 Supercapacitors ;93
4.6.5.2;6.5.2 Photoluminescent Nanosheets;93
4.6.5.3;6.5.3 Nanowire Arrays as Seebeck Generators;94
4.7;7 Functional Molecules;96
4.7.1;7.1 The Molecule as a One-Dimensional Wire;96
4.7.1.1;7.1.1 The Role of Contacts: Landauer Resistance ;97
4.7.1.2;7.1.2 Barrier Transparency;97
4.7.2;7.2 Conduction Along Alkanes;100
4.7.3;7.3 Switchable -Conjugated Molecules;101
4.7.4;7.4 Molecules Exhibiting Superexchange Conduction ;103
4.7.5;7.5 A Comparison of the Switching Mechanisms;105
4.8;8 Grafting Functional Molecules ;107
4.8.1;8.1 Silicon and Its Surfaces;107
4.8.1.1;8.1.1 Silicon Chemistry;109
4.8.1.2;8.1.2 The Role of Surfaces;110
4.8.1.3;8.1.3 The Surface of Single-Crystalline Silicon;111
4.8.1.4;8.1.4 The Surface of Polycrystalline Silicon;117
4.8.1.5;8.1.5 The Surface of Porous Silicon;118
4.8.1.6;8.1.6 Inner Surfaces and the Fantastic Chemistryin Nanocavities;119
4.8.2;8.2 Routes for Silicon Functionalization ;123
4.8.2.1;8.2.1 Hydrosilation;125
4.8.2.2;8.2.2 Hydrosilation at the Hydrogen-Terminated (1 0 0) Si Surface;126
4.8.3;8.3 Grafting in Restricted Geometries ;128
4.8.4;8.4 Three-Terminal Molecules;135
4.8.5;8.5 Nanostructured Oxo-Bonded Silicon ;137
4.8.5.1;8.5.1 Hydrothermal Synthesis: Zeolites;138
4.8.5.2;8.5.2 Hydrolysis and Polycondensation: Aerogels;139
4.9;Concluding Remarks;142
5;Part II Advanced Topics: Self-Similar Structures, Molecular Motors, and Nanobiosystems;143
5.1;9 Examples;144
5.1.1;9.1 Hybrid Molecule–MOS-FET Combination ;144
5.1.2;9.2 Crossbar Functionalization ;146
5.2;10 Self-Similar Nanostructures;150
5.2.1;10.1 Fractals;150
5.2.1.1;10.1.1 Queer Systems;150
5.2.1.2;10.1.2 Fractals in Mathematics;151
5.2.2;10.2 Fractals in Nature;152
5.2.2.1;10.2.1 Fractal Biological Systems;152
5.2.2.2;10.2.2 Fractal Surfaces;153
5.2.3;10.3 Fractals in Technology;155
5.3;11 Molecular Motors ;159
5.3.1;11.1 Molecular Building Blocks;161
5.3.2;11.2 Controlling Movement with Electric Field ;163
5.3.3;11.3 Combining Ballistic and Brownian Motions ;165
5.3.4;11.4 Brownian Motors;168
5.4;12 Nanobiosensing;172
5.4.1;12.1 Reducing Cell Biology to Molecular Biology;172
5.4.2;12.2 From Molecular Biology to Systems Biology;175
5.4.3;12.3 Sensing as a Key Tool for Systems Biology;176
5.4.4;12.4 From ICs to Nanobiosensors;177
5.4.4.1;12.4.1 The Incremental Increase of Complexityof ICs and Sensors;178
5.4.4.2;12.4.2 The Shift of Paradigm;179
5.4.5;12.5 A Roadmap for Nanobiosensing;181
5.4.5.1;12.5.1 Nanobiosensing In Vitro;181
5.4.5.2;12.5.2 Nanobiosensing In Vivo;184
5.5;13 Abstract Technology;186
5.5.1;13.1 Material Bodies and Surfaces;187
5.5.2;13.2 Processes Controlled by Geometry;188
5.5.2.1;13.2.1 Conformal Processes;189
5.5.2.2;13.2.2 Directional Processes;191
5.5.3;13.3 Processes Controlled by the Material;193
5.5.4;13.4 Abstract Technology in Concrete;195
6;References;198
7;Index;208
8;About the Author;212