Fabrication Engineering at the Micro- And Nanoscale

4. Auflage 2012
ISBN: 978-0-19-986122-4
Verlag: OXFORD UNIV PR

Buch, Englisch, 688 Seiten, Format (B × H): 192 mm x 231 mm, Gewicht: 1205 g

Reihe: The Oxford Series in Electrical and Computer Engineering

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Autoren/Hrsg.

Campbell, Stephen A.

Fachgebiete

• Technische Wissenschaften Technik Allgemein Technik: Allgemeines
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau
• Technische Wissenschaften Energietechnik | Elektrotechnik Elektromotoren

Über Autor(innen)

Stephen A. Campbell is the Bordeau Professor of Electrical and Computer Engineering at the University of Minnesota and a fellow of IEEE.