Compact Plasma and Focused Ion Beams

1. Auflage 2013
ISBN: 978-1-4665-5788-8
Verlag: Taylor & Francis Inc

Buch, Englisch, 392 Seiten, Format (B × H): 162 mm x 240 mm, Gewicht: 702 g

This book discusses method to produce compact microwave plasma by overcoming challenges posed by geometrical cutoff of waveguide and density cutoff of plasma alongwith the properties of such compact plasmas. It also brings out a new area of applications where such compact high densities plasmas are utilized for multi-element focused ion beams.

Zielgruppe

Professional Practice & Development

Autoren/Hrsg.

Bhattacharjee, Sudeep

Fachgebiete

• Naturwissenschaften Physik Physik Allgemein
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Mikrowellentechnik
• Naturwissenschaften Physik Quantenphysik Kernphysik

Inhaltsverzeichnis

IntroductionPlasmaParticle InteractionsSome Basic Plasma PropertiesCriterion for the Definition of a PlasmaDifferent Types of PlasmasDescription of PlasmasTheoretical ApproachesMicrowave-Generated PlasmasCompact Microwave Plasma SourcesResearch Objective and MethodsReferencesReview of the Cutoff ProblemA Brief History of Earlier WorkMicrowave Propagation in WaveguidesPlasma Density CutoffReferencesPlasma and Wave DiagnosticsPlasma Diagnostics with Langmuir's ProbesDesign of Electromagnetic ProbesReferencesGenesis of a Wave Induced Discharge: A New PerspectiveIntroductionHistorical Development of Breakdown StudiesModeling of the Electron DynamicsDevelopment of the General AlgorithmField-Free Case: Three-Dimensional Random WalkElectron Transport in the Presence of an EM FieldMagnetostatically Assisted Electron Transport in the Presence of an EM FieldElectric Field Effects and the Random Walk ParameterLinear and Circularly Polarized WavesSummary and ConclusionReferencesPlasma Production in Continuous-Mode Microwaves: Near-Circular MulticuspIntroductionApparatusMulticusp DesignWaveguide DesignExperimental ResultsSpatial Profiles of the PlasmaDiscussionConclusionsReferencesPlasma Production in Continuous-Mode Microwaves: Rectangular Nonmulticusp WaveguideIntroductionExperimental ProceduresExperimental ResultsDiscussionConclusionsReferencesComparison of Square and Near-Circular Multicusp WaveguidesIntroductionWaveguide DesignExperimental ResultsDiscussionConclusionsSummary of Experimental Results in Continuous-Mode MicrowavesSummary of the Plasma Production MechanismsReferencesPlasma Production in Pulsed-Mode Microwaves: General ExperimentIn

Über Autor(innen)

Sudeep Bhattacharjee