Asundi Digital Holography for MEMS and Microsystem Metrology

1. Auflage 2011
ISBN: 978-1-119-97278-5
Verlag: John Wiley & Sons
Format: EPUB
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 232 Seiten, E-Book

Reihe: Microsystem and Nanotechnology Series

Approaching the topic of digital holography from the practicalperspective of industrial inspection, Digital Holography forMEMS and Microsystem Metrology describes the process ofdigital holography and its growing applications for MEMScharacterization, residual stress measurement, design andevaluation, and device testing and inspection. Asundi also providesa thorough theoretical grounding that enables the reader tounderstand basic concepts and thus identify areas where thistechnique can be adopted. This combination of both practical andtheoretical approach will ensure the book's relevance and appeal toboth researchers and engineers keen to evaluate the potential ofdigital holography for integration into their existing machines andprocesses.
* Addresses particle characterization where digital holographyhas proven capability for dynamic measurement of particles in 3Dfor sizing and shape characterization, with applications inmicrofluidics as well as crystallization and aerosol detectionstudies.
* Discusses digital reflection holography, digital transmissionholography, digital in-line holography, and digital holographictomography and applications.
* Covers other applications including micro-optical anddiffractive optical systems and the testing of these components,and bio-imaging.

Autoren/Hrsg.

Asundi, Anand

Inhaltsverzeichnis

About the Editor.
List of contributors.
Chapter 1 Introduction (A. Asundi).
Chapter 2 Digital Reflection Holography and applications (V.R. Singh and A. Asundi).
2.1 Introduction to digital holography and methods.
2.2 Reflection digital holographic microscopy (DHM) developments.
2.3 3D imaging, static and dynamic measurements.
2.4 MEMS/Microsystems characterization applications.
Chapter 3 Digital Transmission Holography and applications (Qu Weijuan).
3.1 Historical Introduction.
3.2 Foundation of Digital Holography.
3.3 Digital Holographic Microscopy System.
3.4 Conclusion.
Chapter 4 Digital In-line Holography and applications (slima Khanam).
4.1. Back ground.
4.2. Digital in-line holography.
4.3. Methodology for 2D measurement of micro-particle.
4.4. Validation and performance of the 2D measurement method.
4.5. Methodology for 3D measurement of micro-fiber.
4.6. Validation and performance of the 3D measurement methods.
4.7. Summary & conclusions.
Chapter 5 Other Applications.
5.1 Digital Holography Tomography (DHT) (Yu Yingjie).
5.2 High resolution Pulsed Digital Holography (Caojin Yuan and Hongchen Zhai).
5.3 Digital Holographic Interferometry for Phase Distribution Measurement (Jianlin Zhao).
Chapter 6 Conclusion.

Über Autor(innen)

Anand Asundi, Nanyang Technological University, Singapore
Anand Asundi is Professor and Deputy Director of the AdvancedMaterials Research Centre at Nanyang Technological University inSingapore. His research interests are in photomechanics and opticalsensors & he has published over 200 papers in peer-reviewedjournals and presented invited and plenary talks at internationalconferences. He has also chaired and organized numerous conferencesin Singapore and other parts of the world.
He is Editor of Optics and Lasers in Engineering and on theBoard of Directors of SPIE, and a fellow of the Institute ofEngineers, Singapore and SPIE. He also holds advisory professorialappointments at Tongji University, Shanghai University and HarbinInstitute of Technology, China. He is Chairman of the AsianCommittee on Experimental Mechanics and the Asia Pacific Committeeon Smart and Nano Materials both of which he co-founded.