Fundamentals of Nanomechanical Resonators

2. Auflage 2023
ISBN: 978-3-031-29630-7
Verlag: Springer International Publishing

Buch, Englisch, 207 Seiten, Format (B × H): 155 mm x 235 mm, Gewicht: 341 g

Now in an updated second edition, this classroom-tested textbook introduces and summarizes the latest models and skills required to design and optimize nanomechanical resonators, taking a top-down approach that uses macroscopic formulas to model the devices. The authors cover the electrical and mechanical aspects of nanoelectromechanical system (NEMS) devices in six expanded and revised chapters on lumped-element model resonators, continuum mechanical resonators, damping, transduction, responsivity, and measurements and noise.
The applied approach found in this book is appropriate for engineering students and researchers working with micro and nanomechanical resonators.

Zielgruppe

Upper undergraduate

Autoren/Hrsg.

Schmid, Silvan

Roukes, Michael Lee

Villanueva, Luis Guillermo

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Technik Allgemein Mess- und Automatisierungstechnik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Konstruktionslehre, Bauelemente, CAD
• Technische Wissenschaften Technik Allgemein Konstruktionslehre und -technik
• Technische Wissenschaften Technik Allgemein Nanotechnologie

Inhaltsverzeichnis

Lumped-Element Model Resonators.- Continuum Mechanical Resonators.- Damping.- Transduction.- Responsivity.- Measurements and Noise.

Über Autor(innen)

Silvan Schmid, Dr. sc., is a Full Professor of Micro and Nanotechnology at the Technical University of Vienna (TU Wien), where he leads the Research Unit of Micro and Nanosensors at the Institute of Sensor and Actuator Systems. Before that, he was an Assistant Professor and later an Associate Professor at the Technical University of Denmark (DTU). Professor Schmid is the co-founder and scientific advisor of the TU Wien spin-off Invisible-Light Labs GmbH, founded in 2019. His research focuses on micro- and nanomechanical resonators for sensor applications and fundamental research.

Guillermo Villanueva, Ph.D., is Professor at Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland, in the Mechanical Engineering Institute (IGM). Before joining EPFL, he was a Marie Curie post-doctoral scholar at DTU (Denmark) and Caltech (California, US) and a post-doc at EPFL-LMIS1. Professor Villanueva has been active in the fields of NEMS/MEMS for sensing, having expertisefrom the design and fabrication to the characterization and applicability. 

Michael Lee Roukes, Ph.D., is Frank J. Roshek Professor of Physics, Applied Physics, and Bioengineering at the California Institute of Technology (Caltech). He was founding Director of Caltech’s Kavli Nanoscience Institute from 2003-2006 and Co-Director from 2008-2013. Professor Roukes' scientific interests range from fundamental science to applied biotechnology – with a unifying theme centered on the development, application, and very-large-scale integration of complex nanostructures.