Roy / Sarkar MEMS and Nanotechnology for Gas Sensors

Erscheinungsjahr 2015
ISBN: 978-1-4987-0013-9
Verlag: CRC Press
Format: PDF
Kopierschutz: Adobe DRM (»Systemvoraussetzungen)

E-Book, Englisch, 242 Seiten

Solid-state gas sensors based on semiconducting sensing materials represent a viable solution for an increasing number of applications, ranging from health care and safety to quality control in industrial processes. Enhancing the sensitivity of the sensor requires an elevated temperature with uniform temperature distribution throughout the sensing layer, which can be accomplished through the use of the MEMS micro-heater. This book covers the different fabrication procedures and sensor applications pertaining to gas sensors with respect to MEMS and nanotechnology.

Autoren/Hrsg.

Roy, Sunipa

Sarkar, Chandan Kumar

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde
• Technische Wissenschaften Technik Allgemein Nanotechnologie
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau Mechatronik, Mikrosysteme (MEMS), Nanosysteme
• Technische Wissenschaften Elektronik | Nachrichtentechnik Elektronik Sensorik

Inhaltsverzeichnis

Introduction. Substrate for MEMS. Deposition. Photolithography—Pattern Transfer. Structuring MEMS—Micromachining. Microheaters for Gas Sensors. Semiconductors as Gas Sensors. Sensing with Graphene. Nanocrystalline Zno-Based Microfabricated Chemical Sensors. Nanostructures for Volatile Organic Compound Detection. Sensor Interfaces. MEMS and Nanotechnology-Enabled Sensor Applications.

Über Autor(innen)

Sunipa Roy is pursuing a doctorate degree and is affiliated with the Department of Electronics and Telecommunication Engineering at Jadavpur University.

Chandan Kumar Sarkar, Ph.D., is with the Department of Electronics and Telecommunication Engineering at Jadavpur University.