Kuo | Thin Film Transistors | Buch | 978-1-4020-7504-9 | sack.de

Buch, Englisch, 1016 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 1897 g

Kuo

Thin Film Transistors

Materials and Processes
2003
ISBN: 978-1-4020-7504-9
Verlag: Springer US

Materials and Processes

Buch, Englisch, 1016 Seiten, Format (B × H): 160 mm x 241 mm, Gewicht: 1897 g

ISBN: 978-1-4020-7504-9
Verlag: Springer US

References. 170 List of Symbols. 176 CHAPTER 4 a-Si:H TFT Structures. 183 YueKuo 1. Introduction. 183 2. Basic Structures. 183 3. Simplified Structures and Processes. 188 4. Unique Structures and Processes. 192 5. Redundant Structures. 195 6. Summary. 198 References. 200 List of Symbols. 202 CHAPTER 5 Deposition of Intrinsic and Doped Semiconductor Thin Films for a-Si:H TFT. 203 YueKuo 1. Introduction. 203 2. Semiconductor Layer Deposition. 206 3. Doped Amorphous and Microcrystalline Silicon. 223 4. Summary. 231 References. 233 List of Symbols. 239 CHAPTER 6 Deposition of Dielectric Thin Films for a-Si:H TFT. 241 YueKuo 1. Introduction. 241 2. Selection of Dielectric Materials and Deposition Methods. 242 3. PECVD SiNx Dielectric Layer. 244 4. Yield Issues Related to Dielectrics. 263 5. Summary. 265 References. 267 List of Symbols. 271 CHAPTER 7 Plasma Etching in a-Si:H TFT Array Fabrication. 273 YueKuo 1. Introduction. 273 2. Topics in Plama Etching of a-Si:H TFTs. 278 Table of Contents Vll 3. Summary. 306 References. 307 CHAPTER 8 Metallization in a-Si:H TFT Array Fabrication. 313 Ken-ichi Onisawa, Shinji Takayama, Yuzo Shigesato, Takuya Takahashi 1. Introduction. 313 2. Basic Understanding of Conductor Lines in TFT LCDs •. •. 314 3. Conductor Requirements for a-Si:H TFTs. 318 4. Conducting Materials for TFT Array. 321 5. Key Issues in Conducting Materials for Advanced TFT Array Fabrication. 324 6. Conductor Deposition for TFT Arrays. 337 7. Wet Etching of Conductors for a-Si:H TFT Arrays. 347 8. Summary.

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Zielgruppe

Research

Autoren/Hrsg.

Kuo, Yue

Fachgebiete

Weitere Infos & Material

1 Introduction.- 1. Brief History of Thin Film Transistors.- 2. a-Si:H TFT LCDs.- 3. Unique a-Si:H TFT Issues.- 4. Chapter Flow in the Book.- References.- 2 a-Si:H TFT Thin Film and Substrate Materials.- 1. Introduction.- 2. Semiconductors.- 3. Dielectrics.- 4. Substrates.- 5. Characterization Techniques.- 6. Summary.- References.- List of Symbols.- 3 Device Physics, Compact Modeling, and Circuit Applications of a-Si:H TFTs.- 1. Introduction.- 2. Density of States and Electronic Transport.- 3. Device Physics and Compact Modeling.- 4. Threshold Voltage Metastibility.- 5. Parameter Extraction.- 6. Circuit Applications.- 7. Summary.- References.- List of Symbols.- 4 a-Si:H TFT Structures.- 1. Introduction.- 2. Basic Structures.- 3. Simplified Structures and Processes.- 4. Unique Structures and Processes.- 5. Redundant Structures.- 6. Summary.- References.- List of Symbols.- 5 Deposition of Intrinsic and Doped Semiconductor Thin Films for a-Si:H TFT.- 1. Introduction.- 2. Semiconductor Layer Deposition.- 3. Doped Amorphous and Microcrystalline Silicon.- 4. Summary.- References.- List of Symbols.- 6 Deposition of Dielectric Thin Films for a-Si:H TFT.- 1. Introduction.- 2. Selection of Dielectric Materials and Deposition Methods.- 3. PECVD SiNx Dielectric Layer.- 4. Yield Issues Related to Dielectrics.- 5. Summary.- References.- List of Symbols.- 7 Plasma Etching in a-Si:H TFT Array Fabrication.- 1. Introduction.- 2. Topics in Plama Etching of a-Si:H TFTs.- 3. Summary.- References.- 8 Metallization in a-Si:H TFT Array Fabrication.- 1. Introduction.- 2. Basic Understanding of Conductor Lines in TFT LCDs.- 3. Conductor Requirements for a-Si:H TFTs.- 4. Conducting Materials for TFT Array.- 5. Key Issues in Conducting Materials for Advanced TFT Array Fabrication.- 6. Conductor Deposition for TFT Arrays.- 7. Wet Etching of Conductors for a-Si:H TFT Arrays.- 8. Summary.- References.- List of Symbols.- 9 Catalytic Chemical Vapor Deposition of a-Si:H TFT.- 1. Introduction: Cat-CVD vs. PECVD.- 2. History of Cat-CVD.- 3. Fundamentals of Cat-CVD Technology.- 4. Performance of Cat-CVD a-Si:H TFT.- 5. Summary.- References.- List of Symbols.- 10 a-Si:H TFT-Based Active Matrix Flat-Panel Imagers for Medical X-ray Applications.- 1. Introduction and Background.- 2. Basic Design and Operation of AMFPIs.- 3. Detailed Functioning and Properties of AMFPIs.- 4. Summary and Outlook.- References.- List of Symbols.- 11 Non-LCD Applications of a-Si:H TFTs.- 1. Introduction.- 2. Medical Imagers.- 3. Flat Panel Displays.- 4. Contact Imagers, Scanners, and Printers.- 5. Photo-Transistors.- 6. Chemical Sensors.- 7. Circuits on Various Substrates.- 8. Summary.- References.- 1 Introduction.- 1. The Increase in Poly-Si TFT Activities.- 2. Scientific and Technology Issues on Poly-Si TFTs.- 3. Chapter Flow in the Book.- 2 Poly-Si Thin Film and Substrate Materials.- 1. Introduction.- 2. Poly-Si Basic Material Properties for TFT Applications.- 3. Dielectric Material Properties for Poly-Si TFT Applications.- 4. Substrates.- 5. Summary.- References.- List of Symbols.- 3 Physics and Modeling of Poly-, Micro-, and Nano-Si TFTs.- 1. Introduction.- 2. Physics of Poly-Si TFTs.- 3. Poly-Si TFT Device Models.- 4. Micro- and Nano-Crystalline Silicon TFTs.- 5. Circuit Simulation Examples.- 6. Summary.- References.- List of Symbols.- 4 Poly-Si TFT Structures.- 1. Introduction.- 2. Basic TFT Structures.- 3. Drain Engineering.- 4. Novel TFT Structures.- 5. Summary.- References.- List of Symbols.- 5 Poly-Si TFTs by Laser Crystallization Methods.- 1. Introduction.- 2. History.- 3. Pulsed Laser Heating and Rapid Crystallization.- 4. Structural and Electrical Properties.- 5. Poly-Si TFT Fabrication and its Characteristics.- 6. Large Crystalline Grain.- 7. CW Laser Crystallization.- 8. Summary.- References.- List of Symbols.- 6 Poly-Si TFTs by Non-Laser Crystallization Methods.- 1. Introduction.- 2. Solid Phase Crystallization (SPC) by Thermal Methods.- 3. Metal Induced Crystallization of a-Si.- 4. Non-Metal Induced Crystallization.- 5. Summary.- References.- List of Symbols.- 7 Poly-Si TFTs by Direct Deposition Methods.- 1. Introduction.- 2. Plasma Enhanced Chemical Vapor Deposition of Poly-Si.- 3. Sputtering.- 4. Low Pressure Chemical Vapor Deposition.- 5. Summary.- References.- List of Symbols.- 8 Doping Techniques for Poly-Si TFTs.- 1. Introduction.- 2. Impact of Doping Techniques.- 3. Doping Methods.- 4. Activation of Dopant Methods.- 5. Summary.- References.- List of Symbols.- 9 Gate Insulators for Poly-Si TFTs.- 1. Introduction.- 2. Required Features for Low Temperature Gate Insulators.- 3. Oxide Formation.- 4. Electrical Properties.- 5. Summary.- References.- List of Symbols.- 10 Process Integration Issues for Poly-Si TFT Fabrication.- 1. Introduction.- 2. Key Process Integration Issues.- 3. Poly-Si TFT Performances.- 4. Summary.- References.- List of Symbols.- 11 Poly-Si TFT Drivers.- 1. Introduction.- 2. Poly-Si TFT Device Characteristics for High Performance Display Drivers.- 3. Poly-Si TFT LCD Data Drivers.- 4. Low Power Consumption Driving Techniques and Circuit Design Using Poly-Si TFT.- 5. Fault-tolerant Poly-Si TFT Circuits.- 6. Poly-Si TFT for Organic EL Display: Pixel Design.- 7. Comparison of Poly-Si TFT Driver Circuits and a-Si:H TFT Driver Circuits.- 8. Summary.- References.- List of Symbols.- 12 Approaches to Poly-Si TFTs on Flexible Substrates.- 1. Introduction.- 2. Substrate Materials.- 3. Direct Fabrication on Flexible Substrates.- 4. Separation and Transfer Approaches.- 5. Reliability of Poly-Si TFTs on Flexible Substrates.- 6. Summary.- References.- List of Symbols.- 13 Poly-Si TFTs for non-LCD Applications.- 1. Introduction.- 2. Applications in VLSIC.- 3. Non-VLSIC Applications.- 4. Summary.- References.- List of Symbols.

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