Transport in Laser Microfabrication

Erscheinungsjahr 2009
ISBN: 978-0-521-82172-8
Verlag: Cambridge University Press

Buch, Englisch, 416 Seiten, Format (B × H): 175 mm x 250 mm, Gewicht: 890 g

Emphasising the fundamentals of transport phenomena, this book provides researchers and practitioners with the technical background they need to understand laser-induced microfabrication and materials processing at small scales. It clarifies the laser/materials coupling mechanisms, and discusses the nanoscale confined laser interactions that constitute powerful tools for top-down nanomanufacturing. In addition to discussing key and emerging applications to modern technology, with particular respect to electronics, advanced topics such as the use of lasers for nanoprocessing and nanomachining, the interaction with polymer materials, nanoparticles and clusters, and the processing of thin films are also covered.

Autoren/Hrsg.

Grigoropoulos, Costas P.

Fachgebiete

• Technische Wissenschaften Maschinenbau | Werkstoffkunde Maschinenbau
• Naturwissenschaften Physik Mechanik Klassische Mechanik, Newtonsche Mechanik
• Technische Wissenschaften Maschinenbau | Werkstoffkunde Technische Mechanik | Werkstoffkunde Festigkeitslehre, Belastbarkeit

Inhaltsverzeichnis

1. Fundamentals of laser energy absorption; 2. Lasers and optics; 3. Thermal processes in laser materials interactions; 4. Desorption at low laser energy densities; 5. Dynamics of laser ablation C. Grigoropoulos and S. Mao; 6. Ultra-fast laser interactions with materials C. Grigoropoulos and S. Mao; 7. Laser processing of thin semiconductor films; 8. Laser-induced surface modification; 9. Laser processing of organic materials S. Mao; 10. Pulsed laser interaction with liquids; 11. Laser cleaning of particulate contaminants; 12. Laser interactions with nanoparticles; 13. Laser-assisted microprocessing; 14. Nano-structuring using pulsed laser radiation.

Über Autor(innen)

Grigoropoulos, Costas P.
Costas P. Grigoropoulos is a Professor in the Department of Mechanical Engineering, University of California, Berkeley, where he has established the Laser Thermal Laboratory, credited with experimental and computational research, and taught undergraduate and graduate courses in heat transfer, thermodynamics, laboratory instrumentation and experimentation, laser processing and diagnostics. He has conducted research at the Xerox Mechanical Engineering Sciences Laboratory, the IBM Almaden Research Center, the Institute of Electronic Structure and Laser, FORTH, Greece and ETH, Zurich, Switzerland. With more than 130 archival technical papers published, he is a fellow of ASME, an Associate Editor for the International Journal of Heat and Mass Transfer, and recipient of the ASME Heat Transfer Memorial Award (2007).